Samsung Display Co., Ltd.

Su-Hyuk Choi

Ung-Soo Lee

Jin-Woo Park

Jae-Sun Lee

Jai-Hyuk Choi

Hun Rae Kim

Hyun Sub Kim

A thin film deposition apparatus, a deposition method using the same, and a method of manufacturing an organic light-emitting display apparatus by using the apparatus are provided. A thin film deposition apparatus is provided that includes a chamber containing a substrate holder on which a substrate is mounted, a plurality of rotary shaft units that change rotation and an inclination angle of the substrate holder, and a target unit that supplies a thin film material for formation on the substrate.

Thin film deposition apparatus, deposition method using the same, and method of manufacturing organic light-emitting display apparatus by using the apparatus

Provided is an organic light emitting display apparatus. The apparatus may include a substrate including a display region where an image is realized and a non-display region surrounding the display region. The apparatus includes an organic light emitting unit including a first electrode, an intermediate layer, and a second electrode, which are disposed in the display region and are sequentially stacked on the substrate. The apparatus also includes a first inorganic film including a first low temperature viscosity transition (LVT) inorganic material having a first viscosity transition temperature, and covering the organic light emitting unit; and a second inorganic film including a second LVT inorganic material having a second viscosity transition temperature lower than the first viscosity transition temperature, and formed in the non-display region.

Organic light emitting display apparatus and method of manufacturing the same

An organic light-emitting display apparatus includes: a substrate, and an organic light-emitting device disposed on the substrate. The organic light-emitting device includes a first electrode, a second electrode, and an intermediate layer including at least an organic emission layer. In addition, the organic light-emitting display apparatus further includes a thin film encapsulating layer disposed on the organic light-emitting device. The thin film encapsulating layer includes at least one inorganic film including a low temperature viscosity transition (LVT) inorganic material. The LVT inorganic material includes tin oxide and at least one of boron oxide (BO), bismuth oxide (BiO), barium oxide (BaO), and ammonium dihydrogen phosphate (NHHPO).

Organic light-emitting display apparatus and method for manufacturing the same

An organic light-emitting display apparatus and a method of manufacturing the organic light-emitting display apparatus. The organic light-emitting display apparatus includes a substrate; a display unit on the substrate; and an encapsulating layer encapsulating the display unit. The encapsulating layer is formed of a low-temperature viscosity transition inorganic material. The encapsulating layer includes nitrogen.

Organic light-emitting display apparatus and method of manufacturing the same

A method of manufacturing an organic light-emitting display apparatus includes disposing a low melting glass (LMG) thin film to cover a display unit disposed on a substrate, and radiating an energy beam onto the LMG thin film. Accordingly, an encapsulation layer having excellent sealing characteristics may be rapidly formed, and thus manufacturing process efficiency and product reliability may be improved.

Method of manufacturing organic light-emitting display apparatus

A method of manufacturing an organic light-emitting display apparatus includes preparing a deposition target in which an organic light-emitting portion is formed on a substrate, forming a pre-encapsulation layer for encapsulating the organic light-emitting portion by using a facing target sputtering apparatus, and forming an encapsulation layer by performing a plasma surface process on the pre-encapsulation layer by using the facing target sputtering apparatus. The facing target sputtering apparatus includes a chamber in which a mounting portion for accommodating the deposition target is provided, a gas supply portion facing the mounting portion and supplying gas to the chamber, a first target portion and a second target portion disposed in the chamber and facing each other, and an induced magnetic field coil surrounding the exterior of the chamber.

Method of manufacturing organic light emitting display apparatus by performing plasma surface process using target sputtering apparatus

An organic light-emitting display device includes: a substrate; an organic light-emitting unit that is formed on the substrate and comprises a first electrode, an intermediate layer, and a second electrode; an organic film formed on the organic light-emitting unit; a first elastic layer that is formed on the organic film and comprises an elastomer; and a first inorganic film that is formed on the first elastic layer and comprises a low temperature viscosity transition (LVT) inorganic material.

Organic light-emitting display device and method of manufacturing the same

An organic light-emitting display and methods of manufacturing the same are disclosed. In one aspect, an organic light-emitting apparatus includes a substrate, a display unit on the substrate, a step compensation layer formed on the display unit and supplementing a step on a surface of the display unit, a first intermediate layer formed on the step compensation layer, and an encapsulation layer formed on the first intermediate layer and sealing the display unit.

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Yongin, South Korea

Su-Hyuk Choi