Commissariat a L'energie Atomique Et Aux Energies Alternatives

Commissariat À L'énergie Atomique Et Aux Énergies Alternatives

Stéphane Pocas

Salim Boutami

Jean-Jacques Yon

Eric Jalaguier

Geoffroy Dumont

Pierre Imperinetti

Patrick Leduc

Agnès Arnaud

Alexandre Mary

Sébastien Cortial

Wilfried Rabaud

This bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared or terahertz wavelengths comprises a substrate and an array of bolometric micro-plates for detecting said radiation that are suspended above the substrate by support arms. It comprises a metallic membrane located above and around each micro-plate and in which openings are formed; said openings in metallic membrane are periodically located in it along at least one predetermined axis with a period equal to or less than where &#x3bb; is a wavelength in the wavelength range that is to be detected and n is the average refraction index of the medium that separates the micro-plate from metallic membrane.

Infrared detector based on suspended bolometric micro-plates

A bolometric array detector for detecting electromagnetic radiation in a predetermined range of infrared wavelengths includes a substrate; an array of bolometric micro-plates for detecting the radiation suspended above the substrate by support arms; and metallic reflectors formed on the substrate underneath the micro-plates to reflect that portion of the radiation which has passed through said micro-plates without being absorbed by the latter. For each micro-plate, a corresponding reflector includes a first part located underneath the micro-plate which extends as a second part not positioned underneath the micro-plate. At least the second part has surface texturing in a repeating pattern for coupling a portion of incident radiation on the second part to a guided wave that propagates towards the first part of the reflector positioned underneath micro-plate.

Growing community of inventors

Grenoble, France

Stéphane Pocas