Credence Systems Corporation

Stuart M Firestone

Wayne H Miller

James Lubin

Chris Paretich

A product change tool for selectively engaging a product change element with an IC tester interface and disengaging the product change element from the tester interface includes a mobile frame mounted to a base frame and constrained to move relative to the base frame along an axis of linear movement, and a force mechanism for urging the mobile frame to move along the axis of linear movement relative to the base frame. The force mechanism includes first and second links pivotally connected together at their proximal ends and secured at their distal ends to the mobile frame and the base frame respectively. The distal ends of the links are spaced apart along the axis of linear movement and the proximal ends of the links are between the distal ends relative to that axis. An actuator is coupled to the proximal ends of the links for urging the proximal ends of the links in directions transverse to the axis of linear movement, whereby the spacing of the distal ends of the links along the axis changes and the mobile frame moves relative to the base frame along the axis.

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Danville, CA, United States of America

Stuart M Firestone