Kla Tencor Corporation

Abbott Laboratories Corporation

Applied Materials, Inc.

Han Sen Medical, Inc.

Primenano, Inc.

Other

Kla-tencor Technologies Corporation

Gatan, Inc.

Stuart L Friedman

John F Heanue

David Lewis Adler

Mark Armstrong McCord

Kirk Joseph Bertsche

Gabor D Toth

Ming Lun Yu

Joseph A Heanue

Mehran Nasser-Ghodsi

Brian Patrick Wilfley

Khashayar Shadman

Michael M Kelly

Rudy Flores Garcia

Stephen Biellak

Daniel Ivanov Kavaldjiev

Alexander Jozef Gubbens

Tai-Hon Philip Chang

James Spallas

Wei Zhao

Michael Karl Kundmann

Ondrej L Krivanek

Mark Mccord

In some aspects, a flow cytometer system is provided that includes beam shaping optics positioned to manipulate a light beam and produce a resulting light beam that irradiates the core stream at the interrogation zone of the flow cell. The beam shaping optics include an acylindrical lens positioned to receive and focus light in a direction of a first axis orthogonal to a direction of light travel, and a cylindrical lens positioned to receive the light output from the acylindrical lens and to focus the light output from the acylindrical lens in a direction of a second axis orthogonal to the first axis and to the direction of light travel. The resulting light beam output has a flat-top shaped intensity profile along the first axis, and a Gaussian-shaped intensity profile along the second axis. Related methods of shaping a light beam at an interrogation zone of a flow cell are also provided.

Beam shaping optics of flow cytometer systems and methods related thereto

A system for atomic force microscopy in which a sharp electrode tip of an flexing probe cantilever is positioned closely adjacent a sample being probed for its electrical characteristics. An optical beam irradiates a portion of the sample surrounding the probe tips and is modulated at a radio or lower modulation frequency. In one embodiment, a reference microwave signal is incident to the electrode tip. Microwave circuitry receives a microwave signal from the probe tip, which may be the reflection of the incident signal. Electronic circuitry processes the received signal with reference to the modulation frequency to produce one or more demodulated signals indicative of the electronic or atomic properties of the sample. Alternatively, the optical beam is pulsed and the demodulated signal is analyzed for its temporal characteristics. The beam may non-linearly produce the microwave signal. Two source lasers may have optical frequencies differing by the microwave frequency.

Optical source in microwave impedance microscopy

Optically excited microwave impedance microscopy

A method and apparatus for inspection and review of defects is disclosed wherein data gathering is improved. In one embodiment, multiple or segmented detectors are used in a particle beam system.

Method and apparatus for inspecting a substrate

A readout apparatus and method for processing spatially distributed signals is disclosed. The readout apparatus and method may reduce/eliminate the impact gain variations among a plurality of sensing channels. This is done by continuously varying the dispersion properties of a signal distribution device, which may induce a spatial shift of the signal distribution during data acquisition, allowing the distributed signals to move across the sensor area. Shifting of the distributed signals may occur multiple times, hence eliminating the impact of gain variation across the sensor array. The accumulated data may be re-assembled subsequently to complete the readout operation.

Readout methodology for multi-channel acquisition of spatially distributed signal

Disclosed herein is a PhotoMultiplier Tube (PMT) designed for use with a surface inspection system such as the Surfscan system, which operates at 266 nm wavelength. The inventive PMT is high efficiency, low noise, and low gain, a combination of features that is specific to the application and contrary to the features of PMT's in the art. The inventive PMT is designed to be tuned to a specific narrow band wavelength of incident light, thereby optimizing the QE at that wavelength. It is further designed to combine a small number of dynodes each having substantially higher secondary electron gain than typical dynodes. By designing the PMT in this way, the excess noise factor is dramatically reduced, yielding a much improved S/N, while still maintaining the overall PMT gain in the lower range suitable for use in a surface inspection system.

Photomultiplier tube optimized for surface inspection in the ultraviolet

Methods and systems for monitoring contact between a medical probe and tissue are provided. A medical probe is introduced into a patient adjacent the tissue. An electrical parameter, e.g., electrical admittance, is measured between a first electrode located on the medical probe and a second electrode remote from the first electrode. The electrical parameter is amplitude modulated in response to a physiological cycle of the patient. Contact between the medical probe and the tissue is detected based on the amplitude modulation of the measured electrical parameter.

System and method for determining electrode-tissue contact based on amplitude modulation of sensed signal

A defect may be characterized using primary radiation directed from a primary electron source to a measurement location on the sample. An electron energy analyzer may capture secondary electrons emitted from the measurement location in a focusing direction by an electron energy analyzer. A transverse focusing device may focus electrons emitted from the measurement location in a transverse direction that is perpendicular to the focusing direction.

Transverse focusing action in hyperbolic field detectors

A method and the instrument for characterization of the defects on a surface with Auger electron spectroscopy in a high vacuum environment are disclosed. Defects on the surface of a sample may be characterized with Auger electron spectroscopy in a high vacuum environment.

Method and instrument for chemical defect characterization in high vacuum

An optical inspection system for inspecting a substrate. A beam source produces a light beam and directs it toward a surface of the substrate, thereby producing a reflected light beam that is received by an intensifier module. A photocathode receives the reflected light beam at a first surface and producing a shower of photoelectrons at a second opposing surface. An electrical field receives the shower of photoelectrons and accelerates the photoelectrons away from the second surface of the photocathode, thereby producing an enhanced output. A sensor receives the enhanced output from the intensifier module and produces electrical signals in response to the enhanced output. A controller receives the electrical signals and produces images of the substrate, based at least in part on the electrical signals. The controller also controls and coordinates the operation of the beam source, the intensifier module, and the sensor.

Image intensification for low light inspection

Growing community of inventors

Palo Alto, CA, United States of America

Stuart L Friedman