Brooks Automation Gmbh

Stuart Beale

Martin Hosek

Christopher A Hofmeister

Robert T Caveney

Jairo Terra Moura

Matthew W Coady

Roumen Botev

Mark Ives

Christopher Hofmeiser

A control system includes a clustered architecture having a master controller, a central control section including one or more first remote controllers under direct control of the master controller, and a distributed control section including a cluster controller controlled by the master controller. The cluster controller controls the activities of one or more second remote controllers. Each of the first and second remote controllers are utilized to drive one or more axes.

Scalable motion control system

A substrate processing apparatus is provided with a substrate transport apparatus. The transport apparatus is used for automating alignment of the processing apparatus. In one aspect, a through-beam sensor on the transport apparatus is used to level parts of the processing apparatus. In another aspect, a through-beam sensor on the transport apparatus is used to determine the locations and angular orientations of substrate stations within a plane. In another aspect, the transport apparatus teaches itself the accurate location of a substrate aligner by repeatedly placing the substrate on the aligner, recording positional data, constructing a cost function, and determining the location of the aligner by minimizing the cost function using a numerical technique.

Substrate transport apparatus with automated alignment

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Lowell, MA, United States of America

Stuart Beale