Asm International N.v.

Stijn De Vusser

Hyung-Sang Park

Peter Marc Zagwijn

An atomic layer deposition-deposited silicon dioxide/metal oxide-nanolaminate, comprising at least one layer of silicon dioxide and at least one layer of a metal oxide, and having a wet etch rate in an etchant, said wet etch rate being either greater or smaller than both a wet etch rate of a film of silicon dioxide and a wet etch rate of a film of said metal oxide in said etchant. Also provided is a method for manufacturing the same.

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Heverlee, Belgium

Stijn De Vusser