Lattice Semiconductor Corporation

Advanced Micro Devices Corporation

Vantis Corporation

Stewart G Logie

Sunil D Mehta

Steven J Fong

Ronald L Cline

Fei Wang

William George En

Chun Jiang

YongZhong Hu

Nui Chong

Jonathan Lin

Farrokh Kia Omid-Zohoor

Jein Chen Young

One aspect relates to a memory circuit that has a programmable non-volatile memory (NVM) cell configured to generate an NVM output signal indicative of a program state of the NVM cell and to configure a volatile output based on the program state of the NVM cell. The NVM cell comprises a first anti-fuse device, a first select device connected in series with the first anti-fuse device at a first node, and a first pass device. The memory circuit also may have a programmable (independently of the NVM cell) volatile memory (VM) cell configured to receive the NVM output signal at a VM input node and to generate a VM output signal indicative of the program state of the VM cell. The NVM cell may have two NV elements that are separately programmable and are separately selectable via separate access transistors to drive the VM input node.

Memory circuit having non-volatile memory cell and methods of using

In one embodiment, an integrated circuit includes a substrate having high voltage transistor regions and low voltage transistor regions. The substrate includes a first trench between and adjacent to the high voltage transistor regions, a second trench between and adjacent to the low voltage transistor regions, and a third trench between the first and second trenches and between and adjacent to a high voltage transistor region and a low voltage transistor region. A thicker silicon dioxide layer lines the first trench and a first portion of the third trench adjacent to a high voltage transistor region. A thinner silicon dioxide layer lines the second trench and a second portion of the third trench adjacent to a low voltage transistor region. A silicon nitride layer is present on the thinner silicon dioxide layer and lines the second trench and the second portion of the third trench but is not present on the thicker silicon dioxide layer and does not line the first trench and the first portion of the third trench.

Shallow trench isolation (STI) with trench liner of increased thickness

A method of manufacturing an integrated circuit includes etching a substrate to create simultaneously a first trench between high voltage transistor regions of the substrate and a second trench between low voltage regions of the substrate. The substrate is then oxidized to form a silicon dioxide layer lining the first and second trenches, the layer having a first thickness. A silicon nitride layer is deposited on the silicon dioxide layer in the first and second trenches. The silicon nitride layer is then etched from the first trench but not from the second trench, thereby exposing the silicon layer in the first trench but not the second trench. The exposed silicon dioxide layer in the first trench is oxidized to increase the thickness of the silicon dioxide layer to a second thickness greater than the first thickness of the unexposed silicon dioxide layer in the second trench. The first and second trenches are then filled with a dielectric material.

A lateral high-voltage junction device for over-voltage protection of an MOS circuit includes a substrate having a first junction region separated from a second junction region by a substrate region. An MOS gate electrode overlies the substrate region and is separated therefrom by a gate dielectric layer. Sidewall spacers reside adjacent to opposing sides of the MOS gate electrode and overlie the substrate region. The substrate region is defined by a junction-free semiconductor region between the first and second junction regions. An input protection circuit employs the lateral high-voltage junction device to transfer voltage transients to a ground node.

Lateral high-voltage junction device

Systems and methods provide electrostatic discharge simulation techniques. For example, a method in accordance with an embodiment of the present invention provides a simulation of electrostatic discharge in integrated circuits. The method may allow for the design of protection circuits and simulating electrostatic discharge events concurrently with the design of the associated electrical circuit.

Electrostatic discharge simulation

A semiconductor device having an EEPROM memory cell includes a substrate having a principal surface and an isolation region having an inner edge surface bounding the tunnel region at the principal surface. The isolation region forms a perimeter of the tunnel region. A capacitor plate overlies the tunnel region and substantially the entire perimeter of the tunnel region. A tunnel dielectric layer overlies the tunnel region and separates the capacitor plate from the tunnel dielectric layer. The edges of the capacitor plate are displaced away from the tunnel dielectric layer to avoid a loss of tunneling current as a result of edge degradation with repeated programming and erasing of the EEPROM memory device. A process for fabrication of the device is also provided.

EEPROM device having an isolation-bounded tunnel capacitor and fabrication process

A zero power memory cell includes first and second NMOS transistors and a PMOS transistor, wherein the first NMOS transistor and first PMOS transistor each include a three-implant channel region, and wherein the second NMOS transistor further includes a two-implant channel region.

Zero power memory cell with reduced threshold voltage

A method for forming a three transistor zero power memory cell including a p-channel sense transistor, an n-channel write transistor, and an n-channel sense transistor including: implanting a p-type impurity into a p-type substrate in which a n-channel high voltage transistor will be formed; implanting an n-type impurity into an n-type well in a p-type substrate in which a p-channel high voltage transistor will be formed; forming a mask to allow implants to occur to p-channel devices; performing a series of n-type dopant implants into the substrate where the p-channel transistors will be formed; growing a high voltage gate oxide; forming a mask to allow implants to occur to n-channel devices, said mask blocking implants to said n-channel sense transistor; and performing a series of p-type implants into the substrate where the n-channel devices will be formed. In addition, a memory cell which may include a first NMOS transistor having a source, drain and gate, and a first PMOS transistor is disclosed. The memory cell includes a first and second NMOS transistors, and a PMOS transistor, wherein the first NMOS transistor and first PMOS transistor each include a three implant channel region, and wherein the second NMOS transistor further includes a two implant channel region.

Zero power memory cell with improved data retention

A non-volatile memory cell at least partially formed in a semiconductor substrate. The cell comprises a first transistor comprising a high voltage NMOS transistor having a first active region and a second active region; a second transistor sharing said second active region and having a third active region in said substrate; an active control gate region formed in said substrate; a polysilicon layer having a first portion forming a gate for said first transistor, and a second portion forming gate for said second transistor and a floating gate overlying said active control gate region. In one embodiment, an oxynitride separates said second portion and said active control gate region.

Compact single-poly two transistor EEPROM cell

Complementary avalanche injection EEPROM cell

The present invention provides a method and system for providing electrical insulation for local interconnect in a logic circuit. A system and method according to the present invention for providing electrical installation for local interconnects during manufacturing of a logic circuit comprising the steps of providing a first layer of material over a semiconductor wafer and providing a second layer of material over the first layer. Additionally, a photoresist material is provided over a portion of the logic circuit to be electrically insulated. Portions of the first and second layers which are unprotected by the photoresist material are then etched. At least a third layer is then provided over the first and second layers, and the third layer is etched such that the first layer as an electrical insulation over the portion of the logic circuit.

Method and system for providing electrical insulation for local interconnect in a logic circuit

A non-volatile memory cell structure comprises a floating gate, a reverse breakdown injection element at least partially formed in a polysilicon layer and operatively coupled to the floating gate, and a transistor at least partially formed in a region of a semiconductor substrate, operatively coupled to the floating gate. In a further aspect, a control gate is capacitively coupled to the floating gate and is formed in said polysilicon layer. The reverse breakdown electron injection element comprises a first, second, and third active regions, the first and second regions comprising a first p/n junction, the second and third active regions comprising a second p/n junction.

Avalanche programmed floating gate memory cell structure with program element in polysilicon

A non-volatile memory cell structure which includes a floating gate, a reverse breakdown element and a read transistor. The reverse breakdown element is at least partially formed in a first region of a first conductivity type in a semiconductor substrate, and underlies a portion of the floating gate; and the read transistor is at least partially formed in the first region and connected to the reverse breakdown element. In a further embodiment a control gate is capacitively coupled to the floating gate and is formed in a second region of the substrate, outside the well region.

Growing community of inventors

Campbell, CA, United States of America

Stewart G Logie