Lam Research Corporation

Steven Salkow

Tuqiang Q Ni

Chung-Ho Huang

Anthony Le

Tuan Ngo

Farro F Kaveh

Connie Lam

A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.

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Pleasanton, CA, United States of America

Steven Salkow