Uchicago Argonne, LLC

Boise State University

Steven Payonk Letourneau

Jeffrey W Elam

Anil U Mane

Devika Choudhury

Angel Yanguas-Gil

Elton Graugnard

Matthias John Young

Transition metal dichalcogenides (TMDs) are deposited as thin layers on a substrate. The TMDs may be grown on oxide substrates and may have a tunable TMD-oxide interface.

Methods to deposit controlled thin layers of transition metal dichalcogenides

A method of etching an organic or hybrid inorganic/organic material. The method etches molecular layer deposition coatings. An etching cycle comprises a first half reaction exposing the coating to a precursor. A second half reaction exposes a second precursor, removing or etching a portion of the coating.

Molecular layer etching

An ultra-thin film transition metal dichalcogenide ('TMD') supported on a support. The TMD is formed from a metal grown by atomic layer deposition ('ALD') on a substrate. The metal is sulphurized to produce a TMD ultra-thin layer.

Method of producing thin layer of large area transition metal dichalcogenides MoSand others

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Naperville, IL, United States of America

Steven Payonk Letourneau