Xergy Incorporated

Rodel Holdings, Inc.

Rohm and Haas Electronic Materials Cmp Holdings, Inc.

Ffi Ionix Ip, Inc.

Steven Naugler

Bamdad Bahar

William H Parmelee

Barry Scott Pinheiro

Brent Alden Junge

Natarajan Venkatakrishnan

Jeffrey Robert Stack

Steven J Pufka

Weitung Wang

Mary Jo Kulp

An electrochemical system includes an electrochemical compressor through which a working fluid that includes a component that primarily acts as an electrochemically-active component flows; a sealed vessel in which the electrochemical compressor is housed; an inlet conduit for passing working fluid into the vessel; and an outlet conduit for passing fluid out of the vessel. The working fluid that leaks from the electrochemical compressor is contained within the vessel.

Electrochemical compression system

An electrochemical compressor type heat pump system is described. An electrochemical compressor compresses a mixed gas refrigerant whereby heat from the compression can be used to heat an object. The electrochemical compressor is capable of producing high pressure gas from a mixed fluid system including an electrochemically-active component, such as hydrogen, and at least one refrigerant fluid, for example water. Any suitable proton associable compound, such as any suitable ionic or polar solvent compound, may be used in the mixed gas refrigerant. The electrochemical compressor may be configured in a hot water heater along with a secondary type heating source to produce a hybrid hot water heater.

Electrochemical compressor based heating element and hybrid hot water heater employing same

A compound membrane for use in electrochemical devices is disclosed. The compound membrane has of proton-conducting polymer cast in a porous media having dispersed therein at least one active ingredients. It supplies considerably improved performance data in comparison to known membranes. The compound membrane electrode can be produced by treating proton-conducting polymers with acetone to obtain polymer pulp, then sulfonating the polymer pulp, combining one or more active ingredients with the polymer pulp and casting the polymer pulp to obtain the membrane.

Active components and membranes for electrochemical compression

A method is provided for forming grooves in a polishing pad useful for planarizing a substrate in a chemical mechanical planarization process. The method maintains average velocity as a function of bit diameter to enable groove formation using a rotating bit, whereby grooves can be formed at a higher rate while maintaining high groove quality and low defectivity.

Curved grooving of polishing pads

This invention relates to polishing pads and a method for making the polishing pad surface readily machineable thereby facilitating permanent alteration of the polishing pad surface to create an advantageous micro-texture. The advantageous micro-texture is statistically uniform and provides a polishing pad with improved break-in preconditioning time. Polishing pads of this invention find application to the polishing/planarization of substrates such as glass, dielectric/metal composites and substrates containing copper, silicon, silicon dioxide, platinum, and tungsten typically encountered in integrated circuit fabrication.

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Hockessin, DE, United States of America

Steven Naugler