Applied Materials, Inc.

Steven Mosbrucker

Philip Allan Kraus

Anantha K Subramani

Xinhai Han

Steven D Marcus

Yang Guo

Kesong Hu

Ramcharan Sundar

Arun Kumar Kotrappa

Seyyed Abdolreza Fazeli

Tianyang Li

Exemplary substrate processing systems may include a chamber body defining a transfer region. The systems may include a first lid plate seated on the chamber body. The first lid plate may define a plurality of apertures through the first lid plate. The systems may include a plurality of lid stacks equal to a number of the plurality of apertures. The systems may define a plurality of isolators. An isolator may be positioned between each lid stack and a corresponding aperture of the plurality of apertures. The systems may include a plurality of annular spacers. An annular spacer of the plurality of annular spacers may be positioned between each isolator and a corresponding lid stack of the plurality of lids stacks. The systems may include a plurality of manifolds. A manifold may be seated within an interior of each annular spacer of the plurality of annular spacers.

Hot showerhead

Growing community of inventors

Santa Clara, CA, United States of America

Steven Mosbrucker