Neocera, Inc.

University System of Maryland

Steven M Green

Thirumalai Venky Venkatesan

Frederick Charles Wellstood

Kolagani S Harshavardhan

Lee A Knauss

Alberto Pique

Randall Christopher Black

Yonggyu Gim

Thirumalai Venketesan

Kalpesh Patel

A film deposition system for coating large surfaces includes a target translated in parallel to the surface, and an energetic beam (laser beam) directed in parallel to the surface to be coated and impinging on the target, so that a plasma plume extends from the target to the surface to be coated. Translational motion of the target relative to the surface to be coated causes the plasma plume to scan over the surface and to deposit a thin film of a material from the target on the surface. Surfaces of unlimited size can be coated by this technique. The system provides short target-surface distances, high deposition rates, and can utilize small targets. An arrangement including several independently controlled and moving targets is utilized for coating surfaces having complicated shapes.

Translational target assembly for thin film deposition system

A cryogenic apparatus for microscopy of physical properties of an object including a thin, stiff, transparent substrate or window within the outer wall of the vacuum space of a dewar and a cryogenic sensor within the vacuum space and spaced very close distances to the window. This construction allows for positioning a sample for measurement outside of the vacuum space, at room temperature or higher and for microscopy of physical properties of the sample by monitoring the output from the cryogenic sensor as it is scanned along the surface of the sample.

Apparatus for microscopic imaging of electrical and magnetic properties

There is provided a scanning laser beam delivery system for use in pulsed laser deposition of a target evaporant (40) onto a substrate (50). The system includes a laser beam source (10) for generating a pulsed laser beam, a beam transfer assembly (20) optically coupled to laser beam source (10) for directing the generated pulse laser beam along an optical path (15) having a terminal segment (15') which impinges upon target evaporant (40); and, a control mechanism (30) coupled to beam transfer assembly (20). Beam transfer assembly (20) includes a scanning mechanism (22) for reversibly translating terminal segment (15') of optical path (15) along a scan direction substantially normal to the direction along which terminal segment (15') has a directional component. Actuation of scanning mechanism (22) is automatically controlled by control mechanism (30).

Scanning laser beam delivery system

A high frequency superconducting device structure is disclosed which comprises an alkaline earth fluoride substrate with a magnesium oxide lower buffer layer on the alkaline earth substrate and an upper buffer layer epitaxial template layer on the magnesium oxide layer for providing a template for epitaxial growth of a high temperature superconducting film on the upper buffer layer, providing reduced dielectric and conducting losses at high frequencies. The disclosed structure may be incorporated into a multi-chip module (MCM) for providing very high speed interconnections.

Superconducting films on alkaline earth fluoride substrates with

This invention directs itself to a pulsed laser passive filter deposition system (10) which provides a blocking and transparent mask mechanism (34) placed between a target (14) and a substrate (12) to be coated. The blocking and transparent mask mechanism (34) includes a blocking member (36) which casts a blocking shadow having a greater cross-sectional area than the substrate (12), to block linearly travelling clustered species particulates (22) from impinging on the substrate (12). The blocking and transparent mask mechanism (34) also includes annularly shaped disk members (38 and 44) having openings (40 and 46) formed in a central portion to allow passage of the atomic species (20) of the composition being coated on the substrate (12) where the atomic species (20) is deflected by impingement with background gas molecules (26). In this manner, the substrate (12) is coated with the atomic species (20) in a uniform coating without having the clustered species (22) being coated on the substrate (12).

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Greenbelt, MD, United States of America

Steven M Green