Globalfoundries Inc.

Globalfoundries U.S. Inc.

Steven Langdon

Thilo Scheiper

Jan Hoentschel

Stefan Flachowsky

Peter Javorka

Thomas Feudel

Dominik M Kleimaier

Ruchil Kumar Jain

Jan Höntschel

Felix Holzmüller

Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. The structure comprises a silicon-on-insulator substrate including a semiconductor substrate, a dielectric layer on the semiconductor substrate, and a semiconductor layer on the dielectric layer. The structure further comprises a gate electrode on the semiconductor layer. The gate electrode comprises a single-crystal semiconductor material. The structure further comprises a spacer structure including a first portion that overlaps with a side surface of the dielectric layer and a second portion that overlaps with a portion of the semiconductor substrate adjacent to the side surface of the dielectric layer.

Structures for a field-effect transistor that include a spacer structure

Performance and/or uniformity of sophisticated transistors may be enhanced by incorporating a carbon species in the active regions of the transistors prior to forming complex high-k metal gate electrode structures. For example, a carbon species may be incorporated by ion implantation into the active region of a P-channel transistor and an N-channel transistor after selectively forming a threshold adjusted semiconductor material for the P-channel transistor, while the active region of the N-channel transistor is still masked.

Reduced threshold voltage-width dependency in transistors comprising high-K metal gate electrode structures

Reduced threshold voltage-width dependency in transistors comprising high-k metal gate electrode structures

The drain and source regions may at least be partially formed by in situ doped epitaxially grown semiconductor materials for complementary transistors in sophisticated semiconductor devices designed for low power and high performance applications. To this end, cavities may be refilled with in situ doped semiconductor material, which in some illustrative embodiments also provides a desired strain in the channel regions of the complementary transistors.

Low-diffusion drain and source regions in CMOS transistors for low power/high performance applications

Methods are provided for fabricating integrated circuits using non-oxidizing resist removal. In accordance with one embodiment the method includes forming a gate electrode structure overlying a semiconductor substrate and applying and patterning a layer of resist to expose a portion of the semiconductor substrate adjacent the gate electrode structure. Conductivity determining ions are implanted into the semiconductor substrate using the gate electrode structure and the layer of resist as an implant mask. The layer of resist is removed in a non-oxidizing ambient and the implanted conductivity determining ions are activated by thermal annealing.

Methods for fabricating integrated circuits using non-oxidizing resist removal

Disclosed herein is a semiconductor device that includes a semiconducting substrate and a work-function adjusting layer positioned at least partially in the semiconducting substrate, the work-function adjusting layer having a middle section, opposing ends and an end region located proximate each of said opposing ends and a gate electrode positioned above the work-function adjusting layer. Each of the end regions has a maximum thickness that is at least 25% greater than an average thickness of the middle section of the work-function adjusting layer.

Semiconductor device with work function adjusting layer having varied thickness in a gate width direction and methods of making same

When forming sophisticated transistors, the channel region may be provided such that the gradient of the band gap energy of the channel material may result in superior charge carrier velocity. For example, a gradient in concentration of germanium, carbon and the like may be implemented along the channel length direction, thereby obtaining higher transistor performance.

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Dresden, Germany

Steven Langdon