Carl Zeiss Sms Ltd.

Apple Inc.

Carl Zeiss Smt Gmbh

Kla-tencor Technologies Corporation

Steven Labovitz

Vladimir Dmitriev

Guy Ben-Zvi

Eitan Zait

Brian Kinting Shiu

Christopher R Pasma

Markus Mengel

Sergey Oshemkov

Katharine R Chemelewski

Weston L Sousa

Ofir Sharoni

Hirotsugu Oba

Junhua Liu

Erez Graitzer

Erik D Gillow

Vladimir Kruglyakov

Ralph Klaesges

Michael P Zhang

Xiao Liu

Joshua Walter

Michael H Tsai

Stephan P Abdo

Vladimir J Dmitriev

Battery systems according to embodiments of the present technology may include a battery including a first electrode terminal and a second electrode terminal accessible along a first surface of the battery. The battery may define a recessed portion of the battery along the first surface of the battery between the first electrode terminal and the second electrode terminal. The battery systems may include a module electrically coupled with the battery. The module may include a circuit board. The module may include a first conductive tab extending from a second surface of the circuit board opposite the first surface of the circuit board. The first conductive tab may be electrically coupling the module with the first electrode terminal. The module may include a second conductive tab extending from the second surface of the circuit board. The second conductive tab may be electrically coupling the module with the second electrode terminal.

Non-rectangular metal batteries

A system for processing a substrate includes a light source to provide light pulses, a stage to support a substrate, optics to focus the light pulses onto the substrate, a scanner to scan the light pulses across the substrate, a computer to control properties of the light pulses and the scanning of the light pulses such that color centers are generated in various regions of the substrate, and at least one of (i) an ultraviolet light source to irradiate the substrate with ultraviolet light or (ii) a heater to heat the substrate after formation of the color centers to stabilize a transmittance spectrum of the substrate.

Controllable transmission and phase compensation of transparent material

Apparatus and method for transmittance mapping of an object which is at least partially transparent to deep ultraviolet radiation. The method comprises directing a wide-band deep ultraviolet radiation so as to illuminate different areas of an array of successive areas of the object; using an optical detector positioned on an opposite side of the object with respect to the radiation source detecting the wide-band deep ultraviolet radiation that emerges from the object; and processing signals from the optical detector to determine the transmittance of the radiation through the different areas of the array of successive areas of the object.

Method and apparatus for DUV transmission mapping

A method for calibration of a substrate inspection tool is disclosed. The tool is used to inspect a standard substrate having simulated contamination defects with known characteristics. Performance of the tool in detecting the simulated contamination defects is determined. The tool exposes the standard substrate and simulated contamination defects to radiation having a wavelength of about 260 nanometers or less. The simulated contamination defects are stable over time under exposure to radiation having a wavelength of about 260 nanometers or less.

Calibration of a substrate inspection tool

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Sunnyvale, CA, United States of America

Steven Labovitz