Advanced Technology Materials, Inc.

Other

Steven J Hultquist

Glenn M Tom

James V McManus

Peter C Van Buskirk

Jose I Arno

W Karl Olander

Luping Wang

James A Dietz

Steven M Lurcott

Joseph P Errico

Peter S Kirlin

Eugene G Banucci

Gary E Michels

A Daniel Warren, Iii

Fluid storage and dispensing systems, and processes for supplying fluids for use thereof. Various arrangements of fluid storage and dispensing systems are described, involving permutations of the physical sorbent-containing fluid storage and dispensing vessels and internal regulator-equipped fluid storage and dispensing vessels. The systems and processes are applicable to a wide variety of end-use applications, including storage and dispensing of hazardous fluids with enhanced safety. In a specific end-use application, reagent gas is dispensed to a semiconductor manufacturing facility from a large-scale, fixedly positioned fluid storage and dispensing vessel containing physical sorbent holding gas at subatmospheric pressure, with such vessel being refillable from a safe gas source of refill gas, as disclosed herein.

Fluid storage and dispensing systems, and fluid supply processes comprising same

A channelized sorbent material comprises porous sorbent particles characterized by an average pore diameter. Each sorbent particle has at least one interior channel of an average transverse dimension (i.e. transverse diameter) that is at least ten times larger than the average pore diameter of the porous sorbent particle. The interior channel may constitute a single cylindrical through-bore in the sorbent particle, or alternatively, an array of intersecting or non-intersecting channels. The porous sorbent particles preferably comprise bead activated carbon particles. Such channelized sorbent material is particular useful as sorbent media in an adsorption-desorption apparatus for storage and dispensing of a sorbable fluid.

Channelized sorbent media, and methods of making same

A fluid storage and dispensing system including a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid. The vessel includes a fluid discharge port for discharging fluid from the vessel. A pressure regulating element in the interior volume of the fluid storage and dispensing vessel is arranged to flow fluid therethrough to the fluid discharge port at a set pressure for dispensing thereof. A controller external of the fluid storage and dispensing vessel is arranged to transmit a control input into the vessel to cause the pressure regulating element to change the set pressure of the fluid flowed from the pressure regulating element to the fluid discharge port. By such arrangement, the respective storage and dispensing operations can have differing regulator set point pressures, as for example a subatmospheric pressure set point for storage and a superatmospheric pressure set point for dispensing.

Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing

A fluid storage and dispensing system including a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid. The vessel includes a fluid discharge port for discharging fluid from the vessel. A pressure regulating element in the interior volume of the fluid storage and dispensing vessel is arranged to flow fluid therethrough to the fluid discharge port at a set pressure for dispensing thereof. A controller external of the fluid storage and dispensing vessel is arranged to transmit a control input into the vessel to cause the pressure regulating element to change the set pressure of the fluid flowed from the pressure regulating element to the fluid discharge port. By such arrangement, the respective storage and dispensing operations can have differing regulator set point pressures, as for example a subatmospheric pressure set point for storage and a super atmospheric pressure set point for dispensing.

A sorbent-based gas storage and dispensing system, including a storage and dispensing vessel containing a solid-phase physical sorbent medium having a sorbate gas physically adsorbed thereon. A chemisorbent material is provided in the vessel to chemisorb the impurities for gas phase removal thereof in the storage and dispensing vessel. Desorbed sorbate gas is discharged from the storage and dispensing vessel by a dispensing assembly coupled to the vessel. The chemisorbent may be provided in a capsule including an impurity-permeable, but sorbate gas-impermeable membrane, and installed in the vessel at the time of sorbent material loading. Semiconductor manufacturing processes and products manufactured by such processes are described.

Sorbent-based gas storage and delivery system for dispensing of

A gas storage and dispensing system, including a gas storage and dispensing vessel, holding a physical adsorbent medium having sorptive affinity for the gas, and desorptive thereof under dispensing conditions. The gas may be an organoleptic gas, a gaseous therapeutic agent, or the like. The gas storage and dispensing system may be constructed with the gas storage and dispensing vessel in gas flow communication with a bladder that is actually manually or mechanically actuated to effect compression and release thereof, to achieve pressure differential-mediated desorption of the gas from the physical adsorbent medium, and discharge of desorbed gas from the vessel.

Adsorbent-based storage and dispensing system

An ornamental metal foil applique for adhesive securement to a dental substrate, comprises a metal foil body having main top and bottom faces of a predetermined shape, preferably with a maximum facial area dimension not exceeding 1 centimeter. The main bottom face may be microetched over at least a major portion of its facial area to enhance the adhesive securement of the applique to the dental substrate and/or have a mesh backing member or other formaminous backing structure secured to such face of the metal foil body. The applique of the invention may be usefully employed for ornamenting a dental substrate of an individual whose mouth contains such dental substrate, by bonding the main bottom face of the shaped metal foil to the dental substrate with an adhesive medium so that the ornamental metal foil applique is in a selected display position on the dental substrate.

Ornamental film article for dental substrate decoration and dental

A composite material comprising a multilaminate structure of amorphous metal and ceramic laminae, and a method of making the same. The material may be formed of a high strength, low inhibitor content, amorphous metal, e.g., in a single ribbon form, or in a woven multi-ribbon sheet form having a substantially greater width than the single ribbon form, in which the amorphous metal is coated with a thin layer of high compressive strength, low temperature curing ceramic. Ceramic/amorphous metal composites of the invention are usefully employed in structural composite applications, in which the amorphous metal may be utilized as an electrically conductive structural component. Superconducting composites are also disclosed, which have potential utility in applications such as power transmission lines, generators, superconducting magnets, high speed operating switches, bolometers, high frequency communications components, and motors.

Amorphous metal - ceramic composite material

A gas delivery system for supplying a vapor phase constituent at low concentration in a carrier gas, wherein the carrier gas is flowed through a contacting zone in which is disposed a permeable film through which the vapor phase constituent permeates into the contacing zone, to yield a product gas mixture comprising the vapor phase constituent and the carrier gas. In a particularly preferred embodiment, concentration of the vapor phase constituent in the product gas mixture is sensed, e.g., by a surface acoustical wave (SAW) concentration sensor device, and the concentration sensing is employed to controllably adjust the flow rate of the carrier gas flowed through the contacting zone, to maintain a selected delivery rate and concentration of the vapor phase constituent in the product gas mixture. The gas delivery system of the invention has particular utility for supplying gaseous dopant source compounds such as arsine, hydrogen selenide, and/or hydrogen telluride, for fabrication of semiconducting materials and semiconductor devices.

Growing community of inventors

Chapel Hill, NC, United States of America

Steven J Hultquist