Average Co-Inventor Count = 7.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Entegris, Inc. (2 from 784 patents)
2 patents:
1. 10354877 - Carbon dopant gas and co-flow for implant beam and source life performance improvement
2. 9960042 - Carbon dopant gas and co-flow for implant beam and source life performance improvement