Cymer, Inc.

Steven F Haas

Alexander Igorevich Ershov

Richard L Sandstrom

Thomas Hofmann

A simple, reliable, easy to use method for calculating bandwidth data of very narrow band laser beams based on bandwidth data obtained with a spectrometer in circumstances where the laser bandwidths are not large compared to the slit function of the spectrometer. The slit function of the spectrometer is determined. Spectral data of the laser beam is measured with the spectrometer to produce a measured laser beam spectrum which represents a convolution of the laser beam spectrum and the spectrometer slit function. This measured laser spectrum is then mathematically convolved with the slit function of the spectrometer to produce a doubly convolved spectrum. Bandwidth values representing true laser bandwidths are determined from measured laser spectrum and the doubly convolved spectrum. Preferably the true laser bandwidths are calculated by determining the difference between &ldquo;twice a measured laser bandwidth&rdquo; and a corresponding &ldquo;doubly convolved bandwidth&rdquo;. This method provides an excellent estimate of the true laser bandwidth because &ldquo;twice the measured laser bandwidth&rdquo; represents two laser bandwidths and two spectrometer slit function bandwidths and the &ldquo;doubly convolved bandwidth&rdquo; represents one laser bandwidth and two spectrometer slit function bandwidths. Thus, the difference is a representation of the true laser bandwidth. In a preferred embodiment the bandwidth parameters measured are the full width half-maximum bandwidth and the 95% integral bandwidth.

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Escondido, CA, United States of America

Steven F Haas