International Business Machines Corporation

Asml Netherlands B.v.

International Business Corporation

Steven Erik Steen

Xiaoyan Shao

Harold John Hovel

Rainer Klaus Krause

Bucknell Chapman Webb

Kevin Shawn Petrarca

Donald Francis Canaperi

Anna Wanda Topol

Mahadevaiyer Krishnan

Michael Straight Hibbs

Douglas C La Tulipe, Jr

Rebecca D Mih

Henry J Grabarz

Lubomyr Taras Romankiw

Sufi Zafar

Markus Schmidt

David James Frank

Hans-Juergen Eickelmann

Yanfeng Wang

Ageeth Anke Bol

Ronald Dean Goldblatt

Michael Haag

James Vichiconti

Matteo Flotta

Chen Shi

Devendra K Sadana

Robert G Biskeborn

David William Abraham

John Michael Cotte

Peilin Song

Franco Stellari

Gregory Michael Wallraff

Frank Staals

Leathen Shi

Claudius Feger

Nicholas C M Fuller

Francois Pagette

Nancy C LaBianca

Carl Eric Larson

Bart Peter Bert Segers

Raman Gobichettipalayam Viswanathan

Sharee Jane McNab

Paulus Jacobus Maria Van Adrichem

Miguel Garcia Granda

Eric Jos Anton Brouwer

Pierre-Yves Jerome Yvan Guittet

Lubomyr T Romanikiw

Disclosed is a method of determining a characteristic of interest, in particular focus, relating to a structure on a substrate formed by a lithographic process, and an associated patterning device and lithographic system. The method comprises forming a modified substrate feature on the substrate using a corresponding modified reticle feature on a patterning device, the modified substrate feature being formed for a primary function other than metrology, more specifically for providing a support for a vertically integrated structure. The modified reticle feature is such that said modified substrate feature is formed with a geometry dependent on the characteristic of interest during formation. The modified substrate feature can be measured to determine said characteristic of interest.

Metrology apparatus and method for determining a characteristic relating to one or more structures on a substrate

A solar cell panel with a bottom cover plate and an electrically conductive bus bar. A top cover plate having at least one electrically conductive land in communication with a bottom surface of the top cover plate. The land having a height extending from the bottom surface of the top cover plate. An array of rows and columns of solar cell chips lying between the bottom cover plate and the top cover plate. Each solar cell chip of the array having an anode adjacent to a top surface and a cathode adjacent to a bottom surface. The bus bar in electrical communication with each cathode of each solar cell chip of the array. Each land in electrical contact with each anode of a solar cell chip of the array. An opening formed between adjacent lands wherein the opening extends at least the height of the lands.

Solar cell panels and method of fabricating same

A method to transfer a layer of graphene from one substrate to another substrate is provided. The method includes providing a first layered structure including, from bottom to top, a copper foil, a layer of graphene, an adhesive layer and a carrier substrate. The copper foil is removed exposing a surface of the layer of graphene. Next, an oxide bonding enhancement dielectric layer is formed on the exposed surface of the layer of graphene. A second layered structure including a receiver substrate and a dielectric oxide layer is provided. Next, an exposed surface of the dielectric oxide layer is bonded to an exposed surface of the oxide bonding enhancement dielectric layer. The carrier substrate and the adhesive layer are removed exposing the layer of graphene.

Graphene layer transfer

The instant disclosure relates to contact grids for use in photovoltaic cells, wherein a cross-section of the contact grid fingers is shaped as a trapezoid, as well as a method of making photovoltaic cells comprising these contact grids. The contact grids of the instant disclosure are cost effective and, due to their thick metal grids, exhibit minimum resistance. Despite having thick metal grids, the unique shape of the contact grid fingers of the instant disclosure allow the photovoltaic cells in which they are employed to retain more solar energy than traditional solar cells by reflecting incoming solar energy back onto the surface of the solar cell instead of reflecting this energy away from the cell.

Low resistance, low reflection, and low cost contact grids for photovoltaic cells

A solar cell panel and method of forming a solar cell panel. The method includes a: forming an electrically conductive bus bar on a top surface of a bottom cover plate; forming an electrically conductive contact frame proximate to a bottom surface of a top cover plate, the top cover plate transparent to visible light; and placing an array of rows and columns of solar cell chips between the bottom cover plate and the top cover plate, each solar cell chip of the array of solar cell chips comprising an anode adjacent to a top surface and a cathode adjacent to a bottom surface of the solar cell chip, the bus bar electrically contacting each cathode of each solar cell chip of the array of solar cell chips and the contact frame contacting each anode of each solar cell chip of the array of solar cell chips.

A device structure for detecting partial pressure of oxygen in blood includes a semiconductor substrate including a source region and a drain region. A multi-layer gate structure is formed on the semiconductor substrate. The multi-layer gate structure includes an oxide layer formed over the semiconductor substrate, a high-k layer formed over the oxide layer, a metal gate layer formed over the high-k layer, and a polysilicon layer formed over the metal gate layer. A receiving area holds a blood sample in contact with the multi-layer gate structure. The high-k layer is exposed to contact the blood sample in the receiving area.

High-k metal gate device structure for human blood gas sensing

A reticle carrier for a polishing tool capable of accommodating a reticle includes a base plate with an obverse and reverse surfaces, a retaining ring secured to the obverse surface of the base plate forming a recess defined by the obverse surface of the rigid base plate and internal edges of the retaining ring. A reticle pad supports a reticle in the recess. The base plate and the reticle pad having an array of matching, aligned passageway holes therethrough for exhaustion of air from space between the base plate and a the reticle and for supply of air to that space so a vacuum can retain a the reticle in place on the reticle carrier under vacuum conditions and application of air under pressure can eject a reticle from the reticle carrier.

Reticle carrier

A method of forming patterned metallization by electrodeposition under illumination without external voltage supply on a photovoltaic structure or on n-type region of a transistor/junction.

Electrodeposition under illumination without electrical contacts

A magnetic head in one embodiment includes a bottom pole; a top pole positioned above a plane extending through the bottom pole and parallel to a plane of deposition of the bottom pole, wherein the top pole is at least partially offset from the bottom pole in a direction parallel to a plane of deposition of the top pole; a first write gap in the top pole; and a first coil for generating a magnetic flux across the first write gap. A method in one embodiment includes forming a bottom pole; forming a top pole above a plane extending through the bottom pole and parallel to a plane of deposition of the bottom pole, wherein the top pole is at least partially offset from the bottom pole in a direction parallel to a plane of deposition of the top pole, wherein at least one write gap is formed in the top pole; forming side poles for coupling the top and bottom poles; and forming a first coil for generating a magnetic flux across the first write gap.

Planar magnetic writer having offset portions

An apparatus for plating a magnetic film on a substrate includes: a track including a plurality of stopping points along the track; a permanent magnet placed on the track such that the permanent magnet can be moved along the track towards and away from the stopping points; at least one plating tank positioned on the stopping point; and a removable high permeability iron flux concentrator inserted into gaps between the substrate and inside walls of the plating tank, substantially surrounding the substrate and extending around and under the substrate.

Apparatus for an enhanced magnetic plating method

A method of manufacturing a solar cell. The method includes the steps of providing a substrate, applying a first dopant to a first surface, applying a second dopant to a second surface, covering the doped first surface with a hard mask, applying a third dopant to the substrate side, removing the hard mask, applying a pattern of first electrical contacts to the doping pattern, and applying a pattern of second electrical contacts to the doped second surface, the pattern of second electrical contacts and the doping pattern being straight-lined opposed.

Method of manufacturing solar cell with doping patterns and contacts

Growing community of inventors

Peekskill, NY, United States of America

Steven Erik Steen