Massachusetts Institute of Technology

Steven E Kooi

Marin Soljacic

John Dimitris Joannopoulos

Edwin Lorimer Thomas

Karl Kimon Berggren

Yi Yang

Jae-Hwang Lee

Ido Kaminer

Charles Roques-Carmes

Nicholas H Rivera

Phillip Donald Keathley

Tena Dubcek

Jonathan Phillip Singer

Yujia Yang

Aviram Massuda

An apparatus for generating Smith-Purcell radiation having at least one spectral component at a wavelength &#x3bb; includes a periodic structure including a dielectric material and an electron source, in electromagnetic communication with the periodic structure, to emit an electron beam propagating within about 5&#x3bb; from a surface of the periodic structure to induce emission of the Smith-Purcell radiation. The electron beam has an electron energy tunable between about 0.5 keV and about 40 keV so as to change a wavelength of the Smith-Purcell radiation.

Apparatus and methods for generating and enhancing Smith-Purcell radiation

Lithographic Method. The method fabricates complex structures and includes depositing a photoresist onto a substrate, the photoresist including a predominantly thermal band of optical absorption possibly due to the incorporation of a doping agent. A three-dimensional pattern is generated within the resist using a first wavelength of light to effect activation of a photoinitiator to produce a latently photostructured resist. Focused laser spike annealing of the photostructured resist with a second wavelength of light selected to be absorbed by the thermally absorbing band to accelerate the photoinduced reaction in the resist is provided. Three-dimensional direct writing may be performed within the resist to define features not part of the interference pattern and the resist is developed to produce the complex structure.

Hybrid lithographic method for fabricating complex multidimensional structures

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Lexington, MA, United States of America

Steven E Kooi