Lumonics Inc.

Steven D Hastie

John Reid

George S Castle

Dust in a gas laser, particularly an excimer laser, is removed from the gas charge by one or more electrostatic precipitators that are located inside the laser vessel in the path of gas circulation that is produced by a fan and passes through the discharge area defined by the main discharge electrodes. The gas is caused to travel rapidly past the precipitator so that only a minor proportion of the dust is removed at each pass, but a low background level of dust in the gas is soon achieved and maintained by repeated such passes. This technique of employing multiple passes, each removing only a small percentage of the dust in the gas at any given time, can also be applied to a system in which the precipitator is located outside the vessel and is connected thereto by conduits.

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Clayton, Canada

Steven D Hastie