Texas Instruments Corporation

Steven D Carlson

Mark E Mason

James D Hurst

A system for varying the transmission of an attenuated phase shift mask ( ) is provided that includes an attenuated phase shift mask ( ), a transparent support ( ) and a modulation system ( ). The mask ( ) comprises a variable transmission material. The transparent support ( ) supports the mask ( ). The modulation system ( ) is operable to apply a variable force at the mask ( ) to control the transmission of the mask ( ).

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Parker, TX, United States of America

Steven D Carlson