Other

Asml Netherlands B.v.

Cymer, Inc.

C & M Sports Enterprises, Inc.

Steven Chang

Matthew Graham

Robert A Bergstedt

Wayne J Dunstan

Paul Frihauf

William N Partlo

Daniel Jason Riggs

Andrew Liu

Igor Vladimirovich Fomenkov

Alexander Anthony Schafgans

James H Crouch

Peter Chung-Yuan Chang

Spencer Rich

Jim Crouch

A seating apparatus for supporting a portion of a user, the seating apparatus comprising a reorientable seat portion including a seat platform and a cutout, wherein the seat selectively underlies a first ischial tuberosity of the user but not the second ischial tuberosity, the selection of which is determined by the orientation of the reorientable seat portion.

Half-sitting stool with supported sit bone

An extreme ultraviolet light system includes a steering system that steers and focuses an amplified light beam traveling along a propagation direction to a focal plane near a target location within an extreme ultraviolet light chamber, a detection system including at least one detector positioned to detect an image of a laser beam reflected from at least a portion of a target material within the chamber, a wavefront modification system in the path of the reflected laser beam and between the target location and the detection system, and a controller. The wavefront modification system is configured to modify the wavefront of the reflected laser beam as a function of a target focal plane position along the propagation direction. The controller includes logic for adjusting a location of the focal plane of the amplified light beam relative to the target material based on the detected image of the reflected laser beam.

Alignment of light source focus

A method and apparatus for control of a dose of extreme ultraviolet (EUV) radiation generated by a laser produced plasma (LPP) EUV light source that combines pulse control mode and pulse modulation. The EUV energy created by each pulse is measured and total EUV energy created by the fired pulses determined, a desired energy for the next pulse is determined based upon whether the total EUV energy is greater or less than a desired average EUV energy times the number of pulses. If the desired pulse energy for the next droplet is within the range of one or more pulse modulation actuators, the pulse is modulated; otherwise, the pulse is fired to miss the droplet. This provides greater control of the accumulated dose as well as uniformity of the EUV energy over time, greater ability to compensate for pulses that generate EUV energy that is higher or lower than nominal expected values, and ability to provide an average EUV energy per pulse that is less than the nominal minimum EUV energy per pulse of the system.

EUV LPP source with improved dose control by combining pulse modulation and pulse control mode

Extreme ultraviolet light (EUV) is produced in a laser-produced plasma (LPP) EUV light source when laser light strikes a target. Measuring reflected light from the target by a Return Beam Diagnostics (RBD) module provides data on EUV production, including but not limited to target position, target focus, target shape, and target profile. In a RBD module, a controller sequences an optical switch to direct the reflected light between a blocking element and a sensing device, providing greater flexibility in measuring the reflected light during different aspects of the EUV generation process, such as different power levels and duty cycles of the laser light striking the target.

System and method for return beam metrology with optical switch

An apparatus includes a drive laser system producing an amplified light beam of pulses that travels along a drive axis; a beam delivery system that directs the amplified light beam of pulses toward a target region; a target material delivery system that provides a target mixture containing a target material in the target region; two or more sensors radially separated from a main axis that crosses the target region, the two or more sensors being configured to detect energy of ultraviolet electromagnetic radiation emitted from a plasma state of the target material when the amplified light beam of pulses intersects the target mixture; and a controller that receives the output from the two or more sensors. The controller is configured to estimate a relative radial alignment between the target mixture and the drive axis within the target region based on an analysis of the detected energy.

Energy sensors for light beam alignment

Described herein are embodiments of a method to control energy dose output from a laser-produced plasma extreme ultraviolet light system by adjusting timing of fired laser beam pulses. During stroboscopic firing, pulses are timed to lase droplets until a dose target of EUV has been achieved. Once accumulated EUV reaches the dose target, pulses are timed so as to not lase droplets during the remainder of the packet, and thereby prevent additional EUV light generation during those portions of the packet. In a continuous burst mode, pulses are timed to irradiate droplets until accumulated burst error meets or exceeds a threshold burst error. If accumulated burst error meets or exceeds the threshold burst error, a next pulse is timed to not irradiate a next droplet. Thus, the embodiments described herein manipulate pulse timing to obtain a constant desired dose target that can more precisely match downstream dosing requirements.

Method of timing laser beam pulses to regulate extreme ultraviolet light dosing

Energy output from a laser-produced plasma (LPP) extreme ultraviolet light (EUV) system varies based on how well the laser beam can maintain focus on a target material to generate the plasma that gives off light. The system and method described herein optimize EUV light generation by using a closed-loop gradient process to track and fine-tune in real-time the positioning of optical elements that determine how the laser beam is focused on the target material. When real-time alignment of the drive laser on droplet position is achieved, EUV generation is optimized.

System and method to optimize extreme ultraviolet light generation

A device for heating and warming food featuring a base with a central member axially projecting it surface which provides heat from its exterior surface. The base is cooperatively engageable with one or a plurality of cooking containers having central cavities adapted to frictionally engage the central member thereby heating food in the containers from a central axis. Secondary cooking containers are engageable to axial projections in the primary cooking contains to allow two foods to be heated at the same time from a central area.

Cooking apparatus employing centrally located heat source

An automatic dual bobbin mechanism is provided. A housing containing two unique bobbin casings and bobbins therein oriented side-by-side with the sewing needle and thread passing between the bobbin casing pair replaces the convention single bobbin configuration. The bobbin pair acts in a tag-team operation whereby one bobbin supplies thread to be stitched into a fabric while the second bobbin is simultaneously filled with thread from an external source. When the first bobbin is emptied, the bobbin pair is rotated 180.degree. inside the housing. The second bobbin, now full, supplies thread for continued stitching while the first bobbin is refilled with thread supplied by the external source. The specially designed bobbins and bobbin casings allow for automatic rethreading of the empty bobbin and cutting of the bobbin thread from external source, thus eliminating the need to manually remove the empty bobbin and assembly, replace with a full bobbin and rethread.

Automatic dual bobbin mechanism

A virus protection system, which may be coupled to an external input/output port of a disk operated data processing system, includes a read only memory in which a redundant partition table is stored, duplicating a partition table on the disk. The virus detection system further includes detection logic which monitors a transfer of data from the disk to a system random access memory and which detects data transfers to a high region of the system memory during initial portions of the transfer. When a virus is detected, the redundant partition table is written onto the disk.

Data processing virus protection circuitry including a permanent memory

A combination arrow sight and support device for use with an arrow having feathers and an archery bow comprises a generally conical frame having a ring portion and a conical portion. The conical portion defines a central arrow support aperture and includes arrow feather slots to permit passage of the feathers therethrough. An entrance slot permits entrance of the arrow into said central aperture. The arrow slots may be either straight or curved to provide an axial rotation to the arrow as it passes through the unit.

Arrow sighting and support apparatus

A combination arrow sight and support device is adapted to be mounted to an archery bow. A horizontal bar projects outwardly from the bow across the plane defined by drawstring action and in front of the drawn position of the drawstring. An arrow support is mounted to the bar and depends therefrom in the plane of drawstring action. A peep-sight, mounted for adjustable travel along the bar, projects upwardly therefrom. A mounting plate, secured to the bow in the area of the bow's hand-grip portion thereof pivotally supports a bar-support arm about a horizontal axis. The bar support arm is also pivotally mounted to the horizontal bar to allow adjustment of the device in the vertical sense with respect to the bow.

Growing community of inventors

San Diego, CA, United States of America

Steven Chang