Canon Kabushiki Kaisha

Molecular Imprints, Inc.

Canon Nanotechnologies, Inc.

Steven C Shackleton

Byung-Jin Choi

Pankaj B Lad

Seth J Bamesberger

Matthew C Traub

Tyler Pearce Mann

Anshuman Cherala

Ian Matthew McMackin

Van Nguyen Truskett

Craig William Cone

Alireza Aghili

Masaki Saito

Whitney Longsine

Antoine Dellinger

Sidlgata V Sreenivasan

Frank Y Xu

Niyaz Khusnatdinov

Makoto Mizuno

Yukio Takabayashi

Tsuyoshi Arai

Xiaoming Lu

Kosta S Selinidis

Zhengmao Ye

James W Irving

John D Williamson

Ozkan Ozturk

Yeong-Jun Choi

Brent Andrew Snyder

Hiroyuki Kondo

Colleen Lyons

Roger R Wenzel

Qi Ni

Brandyn L Kinsey

Christopher Pokorny

A method of cleaning a fluid dispenser for dispensing a material during non-contact maintenance of the fluid dispenser. The fluid dispenser including a plurality of nozzles disposed on a faceplate. The method including applying a suction force onto a surface of the faceplate using a suction apparatus, the suction apparatus being translated from one end of the faceplate to an opposite end of the faceplate such that a portion of nozzles from the plurality of nozzles are exposed to the suction force. The method continues by vibrating a menisci of the portion of nozzles that are exposed to the suction force to remove at least a portion of the material accumulated on the faceplate.

Method of cleaning fluid dispenser by applying suction force and vibrating meniscus

A method of switching a first fluid supplied to a dispenser with a second fluid. The method includes stopping the first fluid from flowing into a common portion of a flow system, causing a flush fluid to flow through the common portion, stopping the flush fluid from flowing into the common portion, removing the flush fluid from the common portion, causing the second fluid to flow through the common portion, and continuously circulating the first fluid to and from a reservoir without the first liquid entering the common portion of the flow system. The continuously circulating of the first fluid begins a) after stopping the fluid liquid from flowing into the common portion of the flow system and b) prior to or during the second fluid flowing through the common portion of the flow system.

Method and system for switching a dispensed fluid in a nanofabrication dispensing system

A superstrate for forming a planarization layer on a substrate can include a body having a first surface, a second surface opposite the first surface, and a chamfered edge between the first surface and the second surface. An opaque layer can coat the chamfered edge. In another embodiment, an opaque layer can coat the chamfered edge and a portion of the second surface. The superstrate can be used for more planarization or other processing sequences without causing extrusion defects.

Superstrate and a method of using the same

A pressure sensor manifold is provided that resolves issues caused by accumulated particles and bubbles to improve print head performance. The pressure sensor manifold includes a fluid inlet, a fluid outlet, and a dome-shape cavity connecting with both the fluid inlet and the fluid outlet. The fluid inlet has a first interior cross-section, and the fluid outlet has a second interior cross-section. The dome-shape cavity has an apex. A line that is tangential to the apex passes through a plurality of points on both the first interior cross-section of the fluid inlet and the second interior cross-section of the fluid outlet.

Pressure sensor manifold with increased photocurable resistance

A method of planarizing a substrate comprises dispensing formable material onto a substrate, contacting a superstrate held by a superstrate chuck with the formable material on the substrate, thereby forming a multilayer structure including the superstrate, a film of the formable material, and the substrate, releasing the multilayer structure from the superstrate chuck, providing a space between the superstrate chuck and the multilayer structure after the releasing, positioning a light source into the provided space between the superstrate chuck and the multilayer structure, and curing the film of the multilayer structure by exposing the film to light emitted from the light source.

Planarization process, planarization system, and method of manufacturing an article

A shaping system comprises a dispensing station configured to dispense formable material on a substrate, a shaping station configured to contact the dispensed formable material on the substrate with a plate, a positioning system configured to move the substrate having the dispensed formable material from the dispensing system to the shaping station, and a cover having one or more walls. While the substrate having the dispensed formable material is moved by the positioning system from the dispensing station to the shaping station, the cover is positioned to enclose the substrate and the dispensed formable material such that a ratio of a diameter of the substrate to a distance between the cover and the substrate to 80:1 to 30:1.

Shaping system including an evaporation cover, shaping process, and method of manufacturing an article

A method of planarizing a substrate comprises dispensing formable material onto a substrate, contacting, at a planarizing station at a first location, a superstrate held by a superstrate chuck with the formable material on the substrate, thereby forming a multilayer structure including the superstrate, a film of the formable material, and the substrate, releasing the superstrate from the superstrate chuck, moving the multilayer structure from the first location to a curing station located at a second location away from the first location, the curing station including an array of light-emitting diodes, and curing the film of the multilayer structure by exposing the film to light emitted from the array of light-emitting diodes.

Planarization process, planarization system and method of manufacturing an article

A fluid dispenser, comprising a dispenser faceplate having at least one ejection port and a dispenser guard. The dispenser guard has at least one opening configured to allow fluid exiting from the ejection port to flow through and at least one drainage structure. The dispenser guard is spaced from the ejection port with a gap small enough to attract the fluid accumulated around the ejection port to flow into the drainage structure.

Dispenser guard and method of manufacturing an article

A method of inspecting a dispenser including a faceplate comprises translating a sensor across the faceplate while measuring a distance between the sensor and the faceplate. The sensor is oriented such that a longitudinal axis of the sensor extends at an acute angle relative to a longitudinal axis of the faceplate. The method may include translating another sensor across the faceplate while measuring the same distance. Or the method may include another translating of the sensor across the faceplate while measuring the same distance. In either case, the sensor is oriented such that the longitudinal axis of the sensor extends at an obtuse angle relative to the longitudinal axis of the faceplate. The method includes determining, based on the measured distances, whether an amount of accumulated formable material on the surface of the faceplate is greater than a predetermined value.

System for detecting accumulated material on a faceplate of a dispenser and method of inspecting the faceplate

An apparatus may include a superstrate. The superstrate may have a body with a first side, a second side opposite the first side, and a first diameter. The superstrate may also include a mesa on the first side of the body. The mesa may have a second diameter. The center point of the body can be different from the center point of the mesa.

Superstrate with an offset mesa and methods of using the same

A pulsation dampener for a dispensing system comprising a housing, a diaphragm comprising at least one fluoropolymer layer, the diaphragm dividing the housing into a first compartment and a second compartment, an inlet port and an outlet port each in fluid communication with the first compartment thereby providing a flow path for a liquid to enter the first compartment via the first inlet port and exit the first compartment via the outlet port, and at least one gas disposed within the second compartment, the at least one gas having a kinetic diameter of 0.36 nm or greater, wherein the fluoropolymer of the at least one fluoropolymer layer and the at least one gas are selected such that a gas transmittance rate of the at least one gas through the diaphragm is from 0 mbar*L/second to 1*10mbar*L/second.

Pulsation dampener with gas retention

A method is provided, comprising creating at least one crack at a point on an edge of a stack of at least a substrate and a superstrate; propagating the crack along the periphery; and moving the superstrate relative to the substrate to complete separation of the superstrate from the substrate.

Planarization process, apparatus and method of manufacturing an article

An apparatus and method for a dispenser with nozzles configured to eject lines of droplets of formable material onto a substrate in response to ejection signals. The fluid dispenser dispenses a first line of ejected droplets of formable material onto a first location on the substrate. A line camera generates camera signals that are representative of the first line of ejected droplets. The camera signals are analyzed to identify malfunctioning nozzles. The fluid dispenser dispenses a second line of ejected droplets of formable material onto a second location on the substrate that compensates for the one or more malfunctioning nozzles.

Systems and methods for detection of and compensation for malfunctioning droplet dispensing nozzles

A fluid dispenser calibration system includes a fluid dispenser having a plurality of nozzles, a balance having a balance surface, and a mask positioned between the fluid dispenser and the balance surface. A nozzle pitch is a distance between two adjacent nozzles. The balance measures mass of fluid dispensed from a single nozzle and measures a change in mass on the balance surface. The balance surface has a linear dimension that is greater than the nozzle pitch. The mask includes an aperture and a catch region. The aperture allows fluid dispensed from the single nozzle to impact the balance surface. The catch region catches fluid dispensed from remaining nozzles in the plurality of nozzles.

Masked quartz crystal microbalance for calibrating and monitoring inkjet dispensers

A cap, a method of using a cap, and a system for using the cap. The cap is capable of being fitted to a bottle. The cap includes a transfer port; and a vent port. The vent port includes a membrane and a valve.

Growing community of inventors

Austin, TX, United States of America

Steven C Shackleton