Photon Dynamics, Inc.

Steven Barnes

Lakshman Srinivasan

Harry Gallarda

Wayne Wang

A repair system for flat panel display (FPD) substrates performs a number of operations, such as automatic image capture and processing, automatic defect classification, automatic repair classification, and repair macro (instruction) generation software. Defect classification, repair classification, and repair macro generation are based on an open architecture and can address any number of use-cases through the use of multi-tiered classifiers, and thus a wide variety of panel designs may be repaired within a single repair tool. The multi-tiered set of classifiers, e.g., defect classifier, repair classifier, enables an efficient decision-making repair process with capability for customization. The multi-tiered classifiers are optionally extended to support statistical learning (both online & batch) and active learning, in the context of a supporting database of defects and associated tools. The classifiers and recipe rules may be automatically or semi-automatically improved over time, incorporating lessons learned by operators while judging defect or repair needs.

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Sunnyvale, CA, United States of America

Steven Barnes