Sinvaco N.v.

Steven August Van Hove

Wilmert De Bosscher

A magnetron including a target ( ) for sputtering onto a substrate in described. The magnetron comprises a magnetic field generator ( ) for generating a closed loop magnetic field adapted to generate a plasma race-track above the target ( ) and a driving device for establishing relative substantially translational movement between the race-track and the target ( ) and adapted to influence the magnetic field generated by the magnetic field generator ( ) at least during part of the relative substantially translational movement, the distance between any point on the race track and the momentarily closest part of the one or more pieces ( ) of ferromagnetic material varying in accordance with the relative substantially translational movement of the race-track and the target ( ).

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Waregem, Belgium

Steven August Van Hove