Applied Materials, Inc.

Steve Park

David P Bour

Nyi O Myo

Lori D Washington

Sandeep Nijhawan

Alexander Tam

Ronald R Stevens

Jacob W Smith

Jie Su

Garry K Kwong

Rosemary Twist

A gaseous mixture is deposited onto a substrate surface using a showerhead. A first plenum of the showerhead has a plurality of channels fluidicly coupled with an interior of a processing chamber. A second plenum gas flows through a plurality of tubes extending from a second plenum of the showerhead through the channels into the interior of the processing chamber. The diameter of the tubes is smaller than the diameter of the channels such that a first plenum gas flows into the interior of the processing chamber through a space defined between the outer surface of the tubes and the surface of the channels. The length and diameter of the tubes determine the level of distribution and the molar ratio of the first gas and the second gas in the gaseous mixture that is deposited on the surface of the substrate.

System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus

Growing community of inventors

Cupertino, CA, United States of America

Steve Park