Micron Technology Incorporated

Steve K McCandless

Gordon A Haller

Amitava Majumdar

Ted Lyle Taylor

Shawn D Lyonsmith

Ahmed Nayaz Noemaun

Qianlan Liu

Pradeep Ramachandran

A method of predicting virtual metrology data for a wafer lot that includes receiving first image data from an imager system, the first image data relating to at least one first wafer lot, receiving measured metrology data from metrology equipment relating to the at least one first wafer lot, applying one or more machine learning techniques to the first image data and the measured metrology data to generate at least one predictive model for predicting at least one of virtual metrology data or virtual cell metrics data of wafer lots, and utilizing the at least one generated predictive model to generate at least one of first virtual metrology data or first virtual cell metrics data for the first wafer lot.

System for predicting properties of structures, imager system, and related methods

Growing community of inventors

Nampa, ID, United States of America

Steve K McCandless