Rudolph Technologies, Inc.

August Technology Corp.

Steve Herrmann

Willard Charles Raymond

Matthew LaBerge

Mark Harless

Jeffrey L O'Dell

Thomas Verburgt

A film frame aligner for automatically aligning a film frame includes a film frame support, a film frame pusher for pushing the film frame, and a film frame location mechanism for locating at least one notch in the film frame.

Adjustable film frame aligner

An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and designed for second optical wafer inspection for such defects as metalization defects (such as scratches, voids, corrosion, and bridging), diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.

Automated wafer defect inspection system and a process of performing such inspection

Growing community of inventors

Chaska, MN, United States of America

Steve Herrmann