Asml Netherlands B.v.

Steve Gregory Brust

Nicholas Peter Waterson

Remco Van De Meerendonk

Güneş Nak{dot Over (i)}boğlu

Shravan Kottapalli

Dirk Martinus Gerardus Petrus Wilhelmus Jakobs

A passive flow induced vibration reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system includes: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that compliance of the membrane reduces at least low frequency flow induced vibrations in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit an extent of deflection of the membrane.

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Eindhoven, Netherlands

Steve Gregory Brust