Fei Comapny

Steve Ake Rosenberg

Raymond Hill

Daniel B Downer

Peter S Chao

Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.

Deflection signal compensation for charged particle beam

A beam processing system, such as a focused ion beam or an electron beam system, addressing an arbitrary series of points and receives data from the points in real time. The data can be used to image or to alter the processing, even within a single dwell period, thereby allowing closed feedback loop for processing. A delay calculator automatically determines the delay between instructing the system to move the beam and detecting a signal from the work piece surface so that the detector signal can be matched with the location on the work piece at which the signal was generated.

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Hillsboro, OR, United States of America

Steve Ake Rosenberg