Intuitive Surgical Operations, Inc.

Novellus Systems Incorporated

Stephen V Gentile

Niels Smaby

George D Kamian

Krishnan Shrinivasan

Amir Hossein Chaghajerdi

Peter Woytowitz

Sassan Roham

James Trevor Clark

Michael Rivkin

A method of manufacturing a surgical instrument mountable to a remotely controllable manipulator configured to operate the surgical instrument includes applying a first tension to a first tensioning element, applying a second tension to a second tensioning element, and maintaining the first and second tensions in the first and second tensioning elements while a first rotatable cylinder is locked to a second rotatable cylinder. The first tensioning element and the second tensioning element are each coupled to a distal end component of the surgical instrument and are coupled to one another such that a tension in one of the first tensioning element and the second tensioning element is transmitted at least in part to the other of the first tensioning element and the second tensioning element.

Assembly process for tensioning elements and related systems

Provided herein are assemblies that, when coupled to an object, are capable of keeping the object at a uniform elevated temperature while removing large amounts of heat from an external source. Applications include various integrated circuit fabrication processes that use such external sources to expose wafers to radiation. In certain embodiments, the assemblies include a pedestal for supporting the wafer or other object. In certain embodiments, the assemblies include a calibrated heat resistance that allows heat be conducted away from the pedestal and wafer to maintain the desired set-point temperature. In certain embodiments, the pedestal may have one or more protrusions used to dissipate or transfer heat from the pedestal to a heat sink. Also, in certain embodiments, the pedestal surface is configured to have a spectral reflectivity of desired values in such way as to reflect the wavelengths that are emitted by an external radiant heat source.

Pedestal heat transfer and temperature control

The present invention provides a heat transfer assembly that, when coupled to an object, is capable of keeping the object at a uniform elevated temperature while removing large amounts of heat from an external source. The assembly may be contained in a pedestal for use in a UV-cure chamber. The heat transfer assembly includes a heating element to control the wafer temperature and a cooling element to remove incident IR heat from the wafer and pedestal. A heat resistant layer having a calibrated heat resistance is located between the heating and cooling elements and between the wafer and the cooling elements. The heat resistant layer is able to sustain high temperature gradient from the wafer to the coolant so that the coolant does not boil while permitting enough heat to be conducted away from the wafer to maintain the desired set-point temperature.

Cast pedestal with heating element and coaxial heat exchanger

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San Jose, CA, United States of America

Stephen V Gentile