Texas Instruments Corporation

Stephen T Tso

William R McKee

Joseph D Luttmer

Charles E Williams

Kent R Carson

Elwin L Johnson

Charlotte M Tipton

Mark R Calley

David L Bouldin

A capped silicide process which prevents reactions between the siliciding metal and oxygen contaminants and prevents silicon outdiffusion. In one form the process entails formation of a cap layer over the metal layer prior to performing the silicide reaction and subsequent removal of the cap layer with an isotropic etchant that does not degrade the underlying silicide.

Isotropic etchant for capped silicide processes

The disclosure relates to a photovoltaic solar array which is provided with a matrix having spherical photovoltaic diode particles embedded therein in an ordered array, the P-type region of each particle extending to one matrix surface and the N-type region of each particle extending to an opposed matrix surface. Backside metallization is disposed on the matrix backside surface to interconnect the particles extending thereto and frontside conductors are provided on the opposing matrix surface to interconnect the particles extending thereto. The matrix includes two portions, the first portion being a layer extending to the frontside formed of a clear glass. The second portion of the matrix is, in effect, two layers, one disposed at the P-N junctions of the particles being a lead base glass for junction passivation, this layer being overcoated with a reflective layer to provide additional reflectivity of light entering the matrix onto the particles. This increases the amount of light impinging on the particles. The frontside of the matrix includes a light transparent conductive material with electrically conductive whiskers embedded therein for improved conductivity.

Photovoltaic solar arrays using silicon microparticles

Growing community of inventors

Dallas, TX, United States of America

Stephen T Tso