Nanoproducts Corporation

Stephen S Williams

Peter Mardilovich

Dmitri Routkevitch

Stephanie Hooker

Alex Govyadinov

Tapesh K Yadav

Device nanotechnology based on silicon wafers and other substrates is described. Methods for preparing such devices are discussed. The teachings allow integration of current semiconductor device, sensor device and other device fabrication methods with nanotechnology. Integration of nanotubes and nanowires to wafers is discussed. Sensors, electronics, biomedical and other devices are presented.

Semiconductor and device nanotechnology and methods for their manufacture

The present invention discloses a type of nanostructured ceramic platform for gas sensors and sensor arrays. These sensors comprise micromachined anodic aluminum oxide films, which contains extremely high density (e.g., 10 cm ) nanoscale pores. Sensing materials deposited inside this self-organized network of nanopores have ultra-high surface area and nanometer grain structure, therefore enabling high sensitivity. Refractory nature of alumina ceramic enables the desired robustness, long lifetime and stability in harsh environment. This sensor platform can been used for both chemical gas and physical (humidity, temperature) sensors and sensor arrays.

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Longmont, CO, United States of America

Stephen S Williams