Other

Lord Corporation

Advanced Silicon Materials LLC

Custom Engineered Materials Inc.

Lord, Stephen M.

Stephen Michael Lord

Robert J Milligan

Kurt O Lund

Lawrence B Anderson

Joseph C McMenamin

John C Schumacher

Harold R Cowles

Kurt Lund

A method of operating a fluidized bed deposition reactor to provide top removal of granular material, including production product is set forth. The vertical generally cylindrical reactor has at least one gas inlet at the lower end, at least one gas and solids outlet at the upper end and a gas/granular product separator connected to the gas and solids outlet. A heated reaction zone located in the lower portion of the reactor includes a fluidized bed; the bed being fluidized to establish a bubbling fluidized bed with a defined stable height. A disengaging space is provided above the stable bed height. A reaction gas is added to the bottom of the reactor, the reaction gas depositing a reaction product coating on the granular particles, the coating being abraded off the granules. The combined flow rate of the fluidizing gas and the reaction gas is adjusted so that a majority of the granular particles are retained in the reactor while maintaining bubbling. The height of the bed is increased and the disengaging height above the bed is decreased until the bursting of bubbles near the surface of the bed throws granular particles through the gas and solids outlet to the gas/granular product separator. The flow rates of the gases are controlled to maintain a balance between particles removed by the separator and the average rate of granular particle size increase as adjusted for attrition.

Apparatus and method for top removal of granular material from a fluidized bed deposition reactor

A gas-solids contactor modification is described which provides for starting or restarting the gas flow to the gas-solids contactor when it is filled with solid particles while preventing the solids from entering and blocking one or more gas inlets which have diameters greater than the solid particle diameters. The apparatus modification comprises a gas plenum and one or more chambers within the gas plenum located between the contactor inlet and the gas inlet. The wall of the chamber has multiple passageways therethrough that are smaller in diameter than the majority of the bed particles. Gas feed to the plenum must pass through the passageways in the chamber walls before entering the contactor. In one embodiment the total open area of the passageways is at least as large as the cross-sectional area of the gas inlet and the inlet to the contactor.

Apparatus for restarting a gas-solids contactor

A dual wall axial flow electric heater for leak sensitive applications provides an improved corrosion and leak resistant assembly and includes protective tubes over electrical heater rods, double tubesheets spaced apart by a plenum and leak detectors positioned to sensor leaks through the walls of the protective tubes. The design includes the option of two or more tube bundles with each inserted into opposite ends of a shell surrounding the tube sheets and heaters. The design provides ease of maintenance since each heater rod can be replaced independently while the unit is in service. Variable heat flux is provided from standard single flux heater rods by providing protective tubes of varying diameters. A built-in thermowell is provided to allow the rod temperatures to be monitored directly. Hot spots are avoided by the use of turning baffles and vibration is avoided by use of spider baffles to support the tubes.

Dual wall axial flow electric heater for leak sensitive applications

A reactor for hydrogenation of a silicon tetrahalide and metallurgical grade silicon to trihalosilane includes a bed of metallurgical silicon particles, one or more gas entry ports, one or more solids entry ports, one or more solids drains and one or more ports for removing the trihalosilane from the reactor. Fresh surfaces are generated on the bed particles by internal grinding and abrasion as a result of entraining feed silicon particles in a silicon tetrahalide/hydrogen feed stream entering the reactor and impinging that stream on the bed of silicon particles. This has the advantages of higher yield of the trihalosilane, higher burnup rate of the MGS, removal of spent MGS as a fine dust carryover in the trihalosilane effluent leaving the reactor and longer times between shutdowns for bed removal.

Apparatus and process for hydrogenation of a silicon tetrahalide and silicon to the trihalosilane

Two low cost processes for removing boron, phosphorus, carbon and titanium during the process of converting metallurgical grade silicon to electronic grade silicon are described. A first process removes boron and titanium by using one or more high temperature solids removal devices for the removal of solid titanium diboride from a halosilane reactor effluent stream where the high temperature is greater than about 200&#xb0; C. A second process removes carbon as methane and phosphorus as phosphine by means of a membrane separator which processes all or part of a hydrogen recycle stream to recover hydrogen while rejecting methane and phosphine.

Set of processes for removing impurities from a silcon production facility

A process for removing aluminum and other metal chlorides from liquid chlorosilanes with the steps of: introducing a source of seed into a source of impure liquid chlorosilanes, initiating the crystallization of aluminum and other metal chlorides on the seed from the liquid chlorosilanes in a first agitated vessel, passing the resulting mixture of liquid and solids through a cooler into a second agitated vessel for additional crystallization, transferring the resulting mixture of liquid and solids into a solids removal device, transferring the liquid with reduced solids content to a further process or vessel and transferring the liquid with high solids content into a waste concentration device, passing the resulting liquid with reduced solids content to a further process or vessel and passing the resultant liquid with very high solids content to a waste storage vessel with agitation.

Process for removing aluminum and other metal chlorides from chlorosilanes

A method for safely handling unstable hydrides, such as germane, in an enclosure which has one or more openings, by partitioning the enclosure into smaller but interconnected volumes and providing heat storage and transfer within the enclosure to rapidly remove heat from any incipient hot spot before it can reach a temperature where it could rapidly propagate to the rest of the enclosure. A preferred embodiment includes where the partitioning material comprises part or all of the means to store the heat and has a large surface area to rapidly adsorb heat from the gases in the smaller volume. An even more preferred embodiment is where the partitioning material comprises materials that can be poured into the enclosure. The use of sensible heat, phase change or chemical reactions are feasible ways to store the heat.

Method for safe handling of unstable hydride gases

A fluidized bed reactor with one or more stages each stage having a heating section located below a reacting section and a mechanism that pulses granules back and forth between the heating and reacting sections, separate injectors for silicon containing gases non silicon containing gases, heaters to heat the non silicon containing gases above the reaction temperature and the silicon containing gases to a temperature just below their decomposition temperature. The heater for the silicon containing gases controls the condensing vapor of a heat transfer fluid to a temperature below the decomposition temperature of the silicon containing gases. An enclosed noncontaminating sieving device selectively removes product and recycles undersize material. A weigh cell with frequency analysis capability provides information on the weight of the reactor and the force exerted by the pulsing action of the granules.

Machine for production of granular silicon

Methods for Heating a Fluidized Bed Silicon Deposition Apparatus with the steps of: one or more heaters and entries to the reactor for the gas or gases which can be heated without decomposition separate from one or more heaters and entries for the gas or gases which decompose to form silicon when heated, heating the gas or gases which do not decompose to temperatures between 400-2000 C., more preferably 800-1600 C., heating the gases which do decompose thermally to temperatures less than the temperature at which they decompose, typically 25-400 C., preferably 300-350 C., and alternatively or in combination with the above steps also providing a means for removal of the silicon beads, heating the beads to a temperature between 800-1200 C. and preferably to a temperature between 900-1100 C. and returning the beads to the reactor. Providing localized cooling of the entries for the thermally decomposable gases. These two heating methods either alone or in combination can provide all the heat needed to operate the reactor in the desired operating range of 800-1100 C. and can provide the heat at the inlet of the reactor where the cold silicon containing gases need to be raised to the operating temperature of the reactor. Heating the non decomposing gases and the silicon beads outside the reactor can be accomplished easily with a variety of low cost heating techniques. Other benefits include, higher flow rates in the reactor, higher production rates, larger and more spherical beads, increased deposition efficiency and reduced risk of sintering and plugging.

Method of improving the efficiency of a silicon purification process

A Method for Improving the efficiency of a silicon purification process is by controlling the temperature and composition of the effluent to a feedstock recovery composition and temperature, rapidly quenching the effluent at or near the recovery composition, separating the gases from the liquids, sending the gases to conventional hydrogen recovery and recycle facilities, separating the hydrohalosilanes from silicon tetrahalide, returning the hydrohalosilanes to the inlet of the deposition reactor, using all or some of the silicon tetrahalide to control the composition and temperature of the effluent and separately heating the hydrogen and any silicon tetrahalide returned to the decomposition reactor to a temperature greater than 400 C. and separately injecting them into the decomposition reactor.

Method for improving the efficiency of a silicon purification process

Silicon beads are produced by chemical vapor deposition (CVD) on seed particles generated internal to a CVD reactor. The reactor has multiple zones, including an inlet zone where beads are maintained in a submerged spouted bed and an upper zone where beads are maintained in a bubbling fluidized bed. A tapered portion of the upper zone segregates beads by size. Systems for inspecting, sorting and transporting product beads are also disclosed.

Silicon deposition reactor apparatus

Method for silicon deposition

An apparatus and process for adsorbing volatile organic compounds, or VOCs, and efficiently regenerating adsorbent material in an emission control system. Flue gas, emitted from a combustion unit burning an outside fuel and desorbed VOCs, is humidified and cooled with a set of water injectors. The resultant humidified flue gas is directed through the adsorbent material, which is rapidly superheated without pressurization. A method for controlling the regeneration cycle of the emission control system includes at least three sensor configurations including a breakthrough sensor, a desorbed gas sensor and a flue gas temperature sensor.

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Encinitas, CA, United States of America

Stephen Michael Lord