International Business Machines Corporation

Globalfoundries Inc.

Infineon Technologies Ag

Macronix International Co., Ltd.

Stephen Mark Rossnagel

Hongbo Peng

Gustavo Alejandro Stolovitzky

Stefan Harrer

Binquan Luan

Cyril Cabral, Jr

Stanislav Polonsky

Ajay K Royyuru

Chung H Lam

Ali Afzali-Ardakani

Philip S Waggoner

Glenn John Martyna

Christian Lavoie

Alejandro Gabriel Schrott

Sandra Guy Malhotra

Xiaoyan Shao

Hyungjun Kim

Hariklia Deligianni

Chao-Kun Hu

Ghavam G Shahidi

Andrew Herbert Simon

Frank Robert Libsch

Richard Alan Haight

Robert L Wisnieff

Geoffrey W Burr

Ko-Tao Lee

Deqiang Wang

Christopher Vincent Jahnes

Chandrasekharan Kothandaraman

John Michael Cotte

Thomas M Shaw

Xiao Hu Liu

George Frederick Walker

Anna Wanda Topol

Christy Sensenich Tyberg

Randolph F Knarr

Philippe M Vereecken

Steffen K Kaldor

Chih-Chao Yang

Daniel C Edelstein

Ying Di Zhang

Takeshi Nogami

Kenneth Parker Rodbell

Zhen Zhang

Dario Leonardo Goldfarb

Dennis Merton Newns

Jerome J Cuomo

Sebastian Ulrich Engelmann

James Patrick Doyle

Harold R Kaufman

Darryl D Restaino

Robert Anthony Rita

Jerry E Hurst, Jr

Simone Raoux

Shafaat Ahmed

Andrew John Kellock

Pavel Smetana

Lawrence Alfred Clevenger

Hsiang-Lan Lung

Michael S Gordon

Mukta G Farooq

Paul Raymond Besser

Soon-Cheon Seo

Timothy Joseph Dalton

Bin Yang

Katherine Lynn Saenger

Oscar Van Der Straten

Shih-Hung Chen

Jeng-Bang Yau

Anthony J Annunziata

Matthew Joseph Breitwisch

Robert J Von Gutfeld

Yu Zhu

Ahmet Serkan Ozcan

Conal Eugene Murray

Hemantha Kumar Wickramasinghe

Steven John Koester

Jan Boris Philipp

Edward Crandal Cooney, Iii

Nathan P Marchack

David Edward Kotecki

Fenton Read McFeely

Jonathan Zanhong Sun

Mahadevaiyer Krishnan

Kaushik Arun Kumar

Gen Pei Lauer

Douglas C La Tulipe, Jr

Roy Arthur Carruthers

Roger W Cheek

Eric Gerhard Liniger

Lynne Marie Gignac

Frances Anne Houle

Laura Louise Kosbar

Mark Hoinkis

Mukta S Farooq

Derren Neylon Dunn

Modest M Oprysko

Patrick William Dehaven

John Bruley

Philip L Flaitz

A hard mask and a method of creating thereof are provided. A first layer is deposited that is configured to provide at least one of a chemical and a mechanical adhesion to a layer immediately below it. A second layer is deposited having an etch selectivity that is faster than the first layer. A third layer is deposited having an etch selectivity that is slower than the first and second layers. The third layer has a composite strength that is higher than the first and second layers. A photoresist layer is deposited on top of the third layer and chemically removed above an inner opening. The third layer and part of the second layer are anisotropically etched through the inner opening. The second layer and the first layer are isotropically etched to create overhang regions of the third layer.

Self-aligned, over etched hard mask fabrication method and structure

A solid state electrochemical battery fabrication device and a method of creating the solid state electrochemical battery are provided. There is a first chamber comprising a first magnetron and a second chamber comprising a second magnetron, coupled to the first chamber. There is a third chamber comprising a vapor source for a polymer deposition, coupled to the second chamber. A Knudsen cell is coupled to the third chamber and configured to deposit lithium on a battery being fabricated. A linear hollow shaft connects the first, second, and third chambers, and provides a hermetic seal. A first telescopic arm having a housing is coupled to a first end of the hollow shaft and configured to extend out of its housing from the first chamber to the second chamber.

Tool and method of fabricating a self-aligned solid state thin film battery

Nanofluidic passages such as nanochannels and nanopores are closed or opened in a controlled manner through the use of a feedback system. An oxide layer is grown or removed within a passage in the presence of an electrolyte until the passage reaches selected dimensions or is closed. The change in dimensions of the nanofluidic passage is measured during fabrication. The ionic current level through the passage can be used to determine passage dimensions. Fluid flow through an array of fluidic elements can be controlled by selective oxidation of fluidic passages between elements.

Feedback control of dimensions in nanopore and nanofluidic devices

Techniques for improving reliability in Cu interconnects using Cu intermetallics are provided. In one aspect, a method of forming a Cu interconnect in a dielectric over a Cu line includes the steps of: forming at least one via in the dielectric over the Cu line; depositing a metal layer onto the dielectric and lining the via such that the metal layer is in contact with the Cu line at the bottom of the via, wherein the metal layer comprises at least one metal that can react with Cu to form a Cu intermetallic; annealing the metal layer and the Cu line under conditions sufficient to form a Cu intermetallic barrier at the bottom of the via; and plating Cu into the via to form the Cu interconnect, wherein the Cu interconnect is separated from the Cu line by the Cu intermetallic barrier. A device structure is also provided.

Techniques to improve reliability in Cu interconnects using Cu intermetallics

A solid state electrochemical battery and a method of creation thereof are provided. There is a first conductive electrode on top of a substrate. There is a first polar conductor layer on top of the conductive electrode layer. A first solid electrolyte layer is on top of the first polar conductor layer. There is a second polar conductor layer on top of the first solid electrolyte layer and a second conductive electrode layer on top of the second polar conductor layer. A third polar conductor layer is on top of the second conductive electrode layer and a second solid electrolyte layer is on top of the third polar conductor layer. There is a fourth polar conductor layer on top of the second solid electrolyte layer and a third conductive electrode layer on top of the fourth polar conductor layer.

Self-aligned 3D solid state thin film battery

A nanodevice includes a reservoir filled with conductive fluid and a membrane separating the reservoir. A nanopore is formed through the membrane having electrode layers separated by insulating layers. A certain electrode layer has a first type of organic coating and a pair of electrode layers has a second type. The first type of organic coating forms a motion control transient bond to a molecule in the nanopore for motion control, and the second type forms first and second transient bonds to different bonding sites of a base of the molecule. When a voltage is applied to the pair of electrode layers a tunneling current is generated by the base in the nanopore, and the tunneling current travels via the first and second transient bonds formed to be measured as a current signature for distinguishing the base. The motion control transient bond is stronger than first and second transient bonds.

DNA sequencing using multiple metal layer structure with different organic coatings forming different transient bondings to DNA

Techniques for fabricating horizontally aligned nanochannels are provided. In one aspect, a method of forming a device having nanochannels is provided. The method includes: providing a SOI wafer having a SOI layer on a buried insulator; forming at least one nanowire and pads in the SOI layer, wherein the nanowire is attached at opposite ends thereof to the pads, and wherein the nanowire is suspended over the buried insulator; forming a mask over the pads, the mask having a gap therein where the nanowire is exposed between the pads; forming an alternating series of metal layers and insulator layers alongside one another within the gap and surrounding the nanowire; and removing the nanowire to form at least one of the nanochannels in the alternating series of the metal layers and insulator layers. A device having nanochannels is also provided.

Techniques for fabricating horizontally aligned nanochannels for microfluidics and biosensors

A method of making a magnetic random access memory (MRAM) device includes forming a magnetic tunnel junction (MTJ) on an electrode, the MTJ including a reference layer positioned in contact with the electrode, a free layer, and a tunnel barrier layer arranged between the reference layer and the free layer; and depositing an encapsulating layer on and along sidewalls of the MTJ by physical sputtering or ablation of a target material onto the MTJ.

Reduced process degradation of spin torque magnetoresistive random access memory

The present invention provides a nano-fluidic field effective device. The device includes a channel having a first side and a second side, a first set of electrodes adjacent to the first side, a second set of electrodes adjacent to the second side, a control unit for applying electric potentials to the electrodes and a fluid within the channel containing a charge molecule. The first set of electrodes is disposed such that application of electric potentials produces a spatially varying electric field that confines a charged molecule within a predetermined area of said channel. The second set of electrodes is disposed such that application of electric potentials relative to the electric potentials applied to the first set of electrodes creates an electric field that confines the charged molecule to an area away from the second side of the channel.

Nano-fluidic field effective device to control DNA transport through the same

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Pleasantville, NY, United States of America

Stephen Mark Rossnagel