Axcelis Technologies, Inc.

Axchlisrtechnologies, Inc.

Stephen M Quinn

William F DiVergilio

Kourosh Saadatmand

Victor M Benveniste

Zhimin Wan

David Richard Swenson

An electrostatic quadrupole lens assembly (,) is provided for an ion implanter (,) having an axis (,) along which an ion beam passes, comprising: (i) four electrodes (,) oriented radially outward from the axis (,), approximately 90&deg; apart from each other, such that a first pair of electrodes (,and,) oppose each other approximately 180&deg; apart, and a second pair of electrodes (,and,) also oppose each other approximately 180&deg; apart; (ii) a housing (,) having a mounting surface (,) for mounting the assembly (,) to the implanter, the housing at least partially enclosing the four electrodes (,); (iii) a first electrical lead (,) for providing electrical power to the first pair of electrodes (,and,); (iv) a second electrical lead (,) for providing electrical power to the second pair of electrodes (,and,); and (v) a plurality of electrically insulating members (,) formed of a glass-like material, comprising at least a first electrically insulating member for attaching the first pair of electrodes (,and,) to the housing, and at least a second electrically insulating member for attaching the second pair of electrodes (,and,) to the housing. The plurality of electrically insulating members (,) are preferably comprised of quartz (SiO,), or a heat resistant and chemical resistant glass material such as Pyrex&reg;. The members (,) resist accumulation of material such as graphite sputtered off of the electrodes (,) by the ion beam, thus reducing the occurrence of high voltage breakdown and electrical current breakdown.

Glass-like insulator for electrically isolating electrodes from ion implanter housing

A compact coil design is provided for a linear accelerator resonator (,) capable of resonating at a predetermined frequency. The coil (,) comprises a plurality of generally circular coil segments (,), each of the coil segments having a polygonal cross section wherein flat surfaces (,) of adjacent coil segments face each other. The polygonal cross section may take the form of a rectangle having dimensions of length x and width y, wherein dimension x section defines the flat surfaces (,) of adjacent coil segments (,). The coil segments (,) are provided with a dual channel construction for providing the introduction of a cooling medium into the coil. The dual channel construction comprises an inlet passageway (,) and an outlet passageway (,) having separate a separate inlet (,) and outlet (,), respectively, at a first end (,) of the coil, and wherein the inlet and outlet passageways (,) are connected and in communication with each other at a second end (,) of the coil.

Compact helical resonator coil for ion implanter linear accelerator

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Gloucester, MA, United States of America

Stephen M Quinn