Applied Materials, Inc.

Elekta Ab (Publ)

Stephen G Young

Per Harald Bergfjord

Christopher Charles Knox

Andrew Long

Kevin J Brown

Richard H Cooke

Dan Thompson

Daniel Thompson

John J Perrins

In various embodiments, a system for controlling radiotherapy equipment in a treatment environment includes a controller for receiving, from one or more image capture devices, data indicating the position of one or more objects in the treatment environment. Based on the position data, the controller defines one or more exclusionary zones from which the radiotherapy equipment is excluded. Each zone has a buffer area surrounding one or more of the objects. The controller further directs the radiotherapy equipment such that a radiotherapy treatment plan is delivered without the equipment entering into the exclusionary zones.

Vision system for radiotherapy machine control

A scan wheel for an ion implanter. The scan wheel having a plurality of wafer support elements each having an elastomer layer on which a wafer is supported. Each wafer support element has a plurality of spring loaded plungers of a material having a lower coefficient of friction than that of the elastomer layer so as to support a wafer such that it can be slid across the wafer support element without sticking to the elastomer layer . A position detector can be provided on a gripper which mounts each wafer on a wafer support element to detect that the wafer has been correctly positioned.

Scanning wheel for ion implantation process chamber

Ion implantation apparatus has an implant wheel in a vacuum chamber. The implant wheel has a number of circumferentially distributed wafer holding positions and is arranged to spin so that the wafers successively intercept an ion beam. The implant wheel is mounted at the free end of a scanning arm which itself is mounted for reciprocating movement on a wall of the vacuum chamber by means of a rotary vacuum seal. A wheel drive motor is mounted in the vacuum chamber on the rotational axis of the implant wheel and the wheel and drive motor combination can be tilted at the end of the scanning arm to adjust the angle of implantation. The tilt actuator is inside the vacuum chamber mounted on the scanning arm and the tilt axis is such that the axis of rotation of the implant wheel remains always in the same plane as the axis of scan of the scanning arm.

Ion implantation apparatus

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Shoreham, United Kingdom

Stephen G Young