Siemens Aktiengesellschaft

International Business Machines Corporation

Globalfoundries Inc.

Stephen G Fugardi

Herbert Lei Ho

David M Dobuzinsky

Erwin Hammerl

Samuel C Ramac

Yun Yu Wang

Oh-Jung Kwon

Atul Champaklal Ajmera

James F Moseman

Sean M Dillon

Alvin Wayne Strong

Herbert Palm

J Herbert Palm

The migration of dislocations into pristine single crystal material during crystal growth of an adjacent conductive strap is inhibited by a conductive barrier formed at the interface between the layers. The conductive barrier may be formed by implanting carbon impurities or depositing Si:C layer that inhibits dislocation movement across the barrier layer, or by forming a passivation layer by annealing in vacuum prior to deposition of amorphous Si to prevent polycrystalline nucleation at the surface of single crystalline Si, or by implanting nucleation promoting species to enhance the nucleation of polycrystalline Si away from single crystalline Si.

Method to improve crystalline regrowth

According to the preferred embodiment of the present invention, an improved resistor and method of fabrication is provided. The method for fabricating a resistive element into an integrated circuit semiconductor device comprises the steps of: depositing a dielectric film, such as silicon nitride; depositing a titanium film upon the dielectric film; and annealing the titanium and dielectric films. This causes titanium to be diffused into the dielectric film. This creates a resistive element having a relatively high resistivity. The preferred embodiment method has the advantage of being easily integrated into conventional integrated circuit fabrication techniques.

Method for fabricating a titanium resistor

Silicon integrated circuits use a crystalline layer of silicon nitride (Si.sub.3 N.sub.4) in shallow trench isolation (STI) structures as an O.sub.2 -barrier film. The crystalline Si.sub.3 N.sub.4 lowers the density of electron traps as compared with as-deposited, amorphous Si.sub.3 N.sub.4. Further, a larger range of low-pressure chemical-vapor deposited (LPCVD) Si.sub.3 N.sub.4 films can be deposited, providing a larger processing window for thickness controllability. An LPCVD-Si.sub.3 N.sub.4 film is deposited at temperatures of 720.degree. C. to 780.degree. C. The deposited film is in an amorphous state. Subsequently, a high-temperatures rapid-thermal anneal in pure nitrogen or ammonia is conducted at 1050.degree. C. to 1100.degree. for 60 seconds.

Application of thin crystalline Si.sub.3 N.sub.4 liners in shallow

Silicon integrated circuits use a crystalline layer of silicon nitride (Si.sub.3 N.sub.4) in shallow trench isolation (STI) structures as an O.sub.2 -barrier film. The crystalline Si.sub.3 N.sub.4 lowers the density of electron traps as compared with as-deposited, amorphous Si.sub.3 N.sub.4. Further, a larger range of low-pressure chemical-vapor deposited (LPCVD) Si.sub.3 N.sub.4 films can be deposited, providing a larger processing window for thickness controllability. An LPCVD-Si.sub.3 N.sub.4 film is deposited at temperatures of 720.degree. C. to 780.degree. C. The deposited film is in an amorphous state. Subsequently, a high-temperatures rapid-thermal anneal in pure nitrogen or ammonia is conducted at 1050.degree. C. to 1100.degree. C. for 60 seconds.

Application of thin crystalline Si.sub.3 N.sub.4  liners in shallow

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New Milford, CT, United States of America

Stephen G Fugardi