Freescale Semiconductor,inc.

Stephen F Abraham

Alex P Pamatat

Brian Bottema

A polishing pad can include a first layer and a second layer. The first layer can have a first polishing surface and a first opening. The second layer can have an attaching surface and a second opening substantially contiguous with the first opening. The polishing pad can further include, a pad window lying within the first opening. The pad window can include a second polishing surface. When the pad would be attached to a platen, the first and second polishing surfaces can lie along a same plane, and an opposing surface of the pad window can abut an exterior surface of a platen window. In another aspect, a polishing apparatus can include an exterior surface of a platen window abutting the polishing pad. In still another aspect, a process of polishing can include polishing a workpiece such that the pad window contacts the workpiece and the platen window simultaneously.

Process of using a polishing apparatus including a platen window and a polishing pad

A polish pad () and platen () assembly for use in chemical mechanical polishing of semiconductor devices includes a platen () having a grooved or channeled surface () which is sealed from the processing environment by an ungrooved portion () at the periphery of the platen (). In addition, the platen () includes one or more passageways () that provide a pathway to ambient or sub-ambient environment. The combination of the sealing region () and the passageway(s) () prevent liquids, vapors or other undesirable contaminants from infiltrating between the pad and platen, and also vent trapped air pockets between the pad and platen.

Grooved platen with channels or pathway to ambient air

A polish pad () and platen () assembly for use in chemical mechanical polishing of semiconductor devices includes a platen () having a vented endpoint window () with one or more venting passageways (e.g.,) and/or a grooved or channeled platen surface () to prevent air pressure buildup in the air gap () by discharging or venting air through one or more vent pathways () formed in the platen to provide a pathway to ambient or sub-ambient environment. The air permeable construction of the vented endpoint window () provides pressure relief for the air gap () between the pad endpoint window () and the vented endpoint window (), but may also include passages () that are filled with an air permeable hydrophobic material which protects the underlying endpoint detection system () from contamination during cleaning of the platen endpoint window ().

Platen endpoint window with pressure relief

Polishing pad, a polishing apparatus, and a process for using the polishing pad

A polishing pad can include a first layer and a second layer. The first layer can have a first polishing surface and a first opening. The second layer can have an attaching surface and a second opening substantially contiguous with the first opening. The polishing pad can further include a pad window lying within the first opening. The pad window can include a second polishing surface and a gas-permeable material. In one aspect, an apparatus can include an attaching surface of a platen lying adjacent to the attaching surface of the polishing pad. In another aspect, a process for polishing can include changing a temperature of a gas within a spaced-apart region formed between a pad and a platen. The process can also include forming a gas flux across the polishing pad after polishing has started.

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Stephen F Abraham