Raytheon Company

Sperry Corporation

Stephen E Bernacki

Joseph T Evans, Jr

Jeff A Bullington

Bernard B Kosicki

Bruce G Armstrong

Architectures for a ferroelectric memory which avoids the half select phenomenon and the problems associated with destructive readout. Non-destructive readout is provided by measuring current through the ferroelectric memory as a measure of its resistance. Information is stored in the ferroelectric memory element by altering its resistance through a polarizing voltage. The half select phenomenon is avoided by using isolation techniques. In various embodiments, zener diodes or bipolar junction transistors are used for isolation.

Ferroelectric memory structure

A method for dry anisotropic etching of semiconductor material by a reactive gas infused in the presence of a low-pressure plasma discharge uses a photoresist mask superposed on a semiconductive film with the slope of the photoresist edges defined within a critical angular range to allow selective formation of a protective polymer film which prevents lateral etching of the edges of the photoresist and sidewalls of the film, while not inhibiting vertical etching, thereby allowing precision definition of the etched pattern. A novel technique to determine the conditions of the photoresist sidewall geometry necessary for polymer film formation and predictable etching behavior encapsulates the film in a thick layer of photoresist, which after cleaving the structure permits selectively etching the photoresist to expose and retain the polymer film without deformation.

Growing community of inventors

Northboro, MA, United States of America

Stephen E Bernacki