Massachusetts Institute of Technology

Sandia Corporation

Polychromix Corporation

The Foxboro Company

Panasonic Technologies, Inc.

Stephen D Senturia

Martin Arnold Schmidt

Roger T Howe

Jeffrey Hastings Lang

Erik R Deutsch

Michael A Butler

Mehran Mehregany

Martin F Schlecht

Malcolm C Smith

Antonio J Ricco

Elmer S Hung

David Volfson

Joseph H Haritonidis

Alan H Epstein

Michael B Sinclair

Stuart A Jacobson

Steven F Nagle

Kenneth S Breuer

Fredric F Ehrich

Ian A Waitz

Mark S Spearing

G K Ananthasuresh

David J Warkentin

Paul M Zavracky

Nam Pyo Suh

David R Day

Ronald P Manginell

Richard H Morrison, Jr

James H Smith

Robert C Hughes

Robert J Huber

Mark G Allen

Lee S Tavrow

Hong Li

Raj K Gupta

Daniel J Moreno

Byung H Kim

Kou Togashi

Steven L Garverick

A waveguide-based sensor is disclosed that uses one or more grating patterns of a bioreceptor on a surface of the waveguide to provide a wavelength-specific sensor response without the requirement of labeling the target molecule or the bioreceptor. Furthermore, there is provided a biosensor that, at least to a first order, is insensitive to non-specific binding.

Optical biosensor incorporating wavelength encoding of multiple unlabeled analytes

A light processor (such as a spectrometer) providing wavelength equalization for a sample pathway and a reference pathway by actuation of a light amplitude modulator. A chemometric processor including a light amplitude modulator capable of performing chemical analysis by applying weights to wavelengths of light, thereby reducing the need for electronic post processing.

Light processor providing wavelength control and method for same

A programmable MEMS diffractive optical processor having actuatable grating elements that are optically adjacent and supported at points intermediate the ends of the grating elements. The grating elements are maintained substantially flat during actuation of the grating elements.

Actuatable diffractive optical processor

A method of redirecting light using an actuatable two-layer diffraction grating structure, the method having applications in wavelength-division multiplexed systems. An optical add/drop modulator (OADM) including an actuatable diffraction grating, for use with a wavelength-division multiplexed signal. An OADM having an optical source located off the main pathway to direct a optical carrier to be added onto the actuatable diffraction grating such that the carrier is diffracted into the main pathway. A detector to measure signal strength for use with an optical processor, the optical processor having an actuatable structure having gaps between the actuated portion of the structure. The detector detecting the portions of light diffracted by the gaps.

Methods and apparatus for diffractive optical processing using an actuatable structure

The invention provides an electrostatically-controllable diffraction grating including a plurality of electrically isolated and stationary electrodes disposed on a substrate. At least one row of a plurality of interconnected actuation elements is provided, with each actuation element suspended, by a corresponding mechanically constrained support region, over the substrate by a vertical actuation gap and including a conducting actuation region connected to the corresponding support region and disposed in a selected correspondence with at least one substrate electrode. A mirror element is provided, for at least one actuation element in at least one row of actuation elements, including an optically reflecting upper surface, and being vertically suspended over a corresponding actuation element by a mechanically constrained mirror support region that is connected to the corresponding actuation element and that defines a vertical mirror gap. A mirror deflection region connected to the mirror support region and is free to be deflected through the mirror gap. The mirror gap is less than the actuation gap of a corresponding actuation element and is selected to produce controlled and stable displacement of the actuation region of a corresponding actuation element through a displacement range to a specified point in the actuation gap when an actuation voltage is applied between an actuation region and a corresponding stationary electrode. This enables diffraction of a beam of light incident on the grating as the light beam is reflected from the upper surfaces of the mirror elements.

Electrostatically-controllable diffraction grating

The invention overcomes limitations of conventional power and thermodynamic sources by with micromachinery components that enable production of significant power and efficient operation of thermodynamic systems in the millimeter and micron regime to meet the efficiency, mobility, modularity, weight, and cost requirements of many modern applications. A micromachine of the invention has a rotor disk journalled for rotation in a stationary structure by a journal bearing. A plurality of radial flow rotor blades, substantially untapered in height, are disposed on a first rotor disk face, and an electrically conducting region is disposed on a rotor disk face. A plurality of stator electrodes that are electrically interconnected to define multiple electrical stator phases are disposed on a wall of the stationary structure located opposite the electrically conducting region of the rotor disk. A first orifice in the stationary structure provides fluidic communication with the first rotor disk face at a location radially central of the rotor blades, and a second orifice in the stationary structure provides fluidic communication with the first rotor disk face at a location radially peripheral of the rotor blades. An electrical connection to the stator electrode configuration is provided for stator electrode excitation and for power transfer with the stator electrode configuration as the rotor disk rotates.

Microturbomachinery

There is provided an electrostatically-controllable actuator having a stationary electrode, with an actuating element separated from the stationary electrode by an actuation gap. The actuating element includes a mechanically constrained support region, a deflection region free to be deflected through the actuation gap, and a conducting actuation region extending from about the support region to the deflection region. A commonality in area between the actuation region and the stationary electrode is selected to produce controlled and stable displacement of the deflection region over a displacement range, e.g., extending to a specified point in the actuation gap, when an actuation voltage is applied between the actuation region and the stationary electrode. This range of stable displacement, which can be stable bending, can extend to a point greater than about &frac13; of the actuation gap, or even through the full actuation gap. As a result, the invention overcomes the limitation of &frac13; gap actuation of conventional electrostatic actuation configurations.

Precision electrostatic actuation and positioning

A fluid property sensor includes a substrate having a first electrode thereon, and a flexible member adjacent the substrate and the first electrode wherein the flexible member includes a second electrode. A signal generator generates a predetermined electrical signal across the first and second electrodes so that an electrostatic force is generated between the first and second electrodes and so that said flexible member deflects a predetermined distance. A measuring circuit measures an interval of time between the generation of the predetermined electrical signal and the deflection of the flexible member to the predetermined distance and determines a property of a fluid adjacent the flexible member based on the interval of time. For example, the sensor can be used to determine a viscosity of the fluid. Alternately, the fluid can be a compressible gas, and the sensor can be used to determine a pressure of the gas. Related methods are also discussed.

Electrostatically-actuated structures for fluid property measurements

The invention provides a micro-gas turbine engine and associated microcomponentry. The engine components, including, e.g., a compressor, a diffuser having diffuser vanes, a combustion chamber, turbine guide vanes, and a turbine are each manufactured by, e.g., microfabrication techniques, of a structural material common to all of the elements, e.g., a microelectronic material such as silicon or silicon carbide. Vapor deposition techniques, as well as bulk wafer etching techniques, can be employed to produce the engine. The engine includes a rotor having a shaft with a substantially untapered compressor disk on a first end, defining a centrifugal compressor, and a substantially untapered turbine disk on the opposite end, defining a radial inflow turbine. The rotor is preferably formed of a material characterized by a strength-to-density ratio that enables a rotor speed of at least about 500,000 rotations per minute. An annular, axial-flow combustion chamber is provided that is located axially between the compressor and turbine disks and that has a ratio of annular height to axial length of at least about 0.5. The micro-gas turbine engine can be configured with an integral microgenerator as a source of electrical power, and can be employed for a wide range of power, propulsion, and thermodynamic cycle applications.

Optical apparatus for forming correlation spectrometers and optical processors. The optical apparatus comprises one or more diffractive optical elements formed on a substrate for receiving light from a source and processing the incident light. The optical apparatus includes an addressing element for alternately addressing each diffractive optical element thereof to produce for one unit of time a first correlation with the incident light, and to produce for a different unit of time a second correlation with the incident light that is different from the first correlation. In preferred embodiments of the invention, the optical apparatus is in the form of a correlation spectrometer; and in other embodiments, the apparatus is in the form of an optical processor. In some embodiments, the optical apparatus comprises a plurality of diffractive optical elements on a common substrate for forming first and second gratings that alternately intercept the incident light for different units of time. In other embodiments, the optical apparatus includes an electrically-programmable diffraction grating that may be alternately switched between a plurality of grating states thereof for processing the incident light. The optical apparatus may be formed, at least in part, by a micromachining process.

Optical apparatus for forming correlation spectrometers and optical

A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. The filaments tested to date are 2 .mu.m thick.times.10 .mu.m wide.times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500.degree. C.; Pt deposits only on the hot filament. Using a constant-resistance-mode feedback circuit, Pt-coated filaments operating at ca. 300.degree. C. (35 mW input power) respond linearly, in terms of the change in supply current required to maintain constant resistance (temperature), to H.sub.2 concentrations between 100 ppm and 1% in an 80/20 N.sub.2 /O.sub.2 mixture. Other catalytic materials can also be used.

Calorimetric gas sensor

An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometers (e.g. correlation and scanning spectrometers).

Electrically-programmable diffraction grating

A method for polishing a substrate having at least one micro-sized structure. The method includes identifying a first region of the substrate on which a micro-sized structure is to be located. The first region is the region in which polishing is desired. A second region of the substrate, in which polishing is not desired, is also identified. An adhesion promoter is optionally applied to the substrate. The second region of the substrate is coated with a selected coating material that does not degrade substantially when exposed to a selected electrolyte. Material is removed from the first region, exposing a micro-sized structure. The coating material may be removed by the same machining process that forms the micro-sized structure. The substrate is submerged in the selected electrolyte so that the first region is exposed to the electrolyte. The first region of the substrate is electropolished. The coating is then optionally removed.

Method for polishing micro-sized structures

A multi-layer interconnect structure of alternating dielectric (e.g., polyimide) and metal (e.g., copper) is built on a substrate supporting a continuous layer of metal. This metal layer is used as an electrode for plating vias through all the dielectric layers. Once the desired number of layers are formed, the substrate is removed and the continuous metal layer is patterned. Solid metal vias having nearly vertical side walls can be stacked vertically, producing good electrical and thermal transfer paths and permitting small, closely-spaced conductors. Further, by mixing geometrical shapes of conductors, a variety of useful structures can be achieved, such as controlled impedance transmission lines and multiconductor TAB tape with interconnects on tape of different dimensions than TAB fingers.

High-density, multi-level interconnects, flex circuits, and tape for tab

An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and edges of the moveable member. Three fabrication processes enable formation of a moveable member in the plane of operation of the stator and spaced apart from the stator by a micron amount. One fabrication process deposits and patterns a structural layer to form the stator and moveable member over a sacrificial layer. A second fabrication process etches channels in a first structural layer to outline a stator, moveable member, and if desired, a bearing. A substrate is connected to the side of the structural layer through which the channels are etched and the opposite side is ground down to the ends of the channels to form salient stator, rotor and, if desired, bearing structures. The third fabrication process grows a sacrificial layer by local oxidation in an etched cavity of the substrate. A structural layer is then deposited and patterned over the substrate and sacrificial layer to form the stator and moveable member in a common plane. A harmonic side drive micromotor is also provided by the fabrication processes.

Growing community of inventors

Brookline, MA, United States of America

Stephen D Senturia