Praxair Technology, Inc.

American Air Liquide, Inc.

Air Liquide America, L.p.

Stephen Chesters

Hwa-Chi Wang

Kenneth Leroy Burgers

Keith Randall Pace

Brian Michael Meredith

Justin Cole Germond

Horng-Yuan Wen

Charles A White

Jack W Erb

Thomas P Ross

Roger Q Petton

Ben R Hall

Yan Xu

Dean L Doty

Edward Pryor

Reginald Wynne

Methods, apparatuses and systems are disclosed for supplying gas from a multi-container Bulk Specialty Gases Supply System wherein at least one process parameter is automatically monitored to prevent over-filling of at least a first and second container without operator intervention.

Method and apparatus for simultaneous gas supply from bulk specialty gas supply systems

Provided are apparatuses and methods for mixing gases. The apparatuses are suitable for use in the manufacture of an electronic device. The apparatuses include a gas mixing manifold. A first, bulk gas source is connected to introduce a flow of a first gas to the manifold. A second gas source is connected to introduce a flow of a second gas to the manifold. The first and second gases are mixed in the manifold, thereby forming a gas mixture. A conduit is connected to one or more point of use for introducing a flow of the gas mixture thereto. The present invention is particularly applicable in the semiconductor manufacturing industry.

Apparatus and method for mixing gases

A method is described to remove condensible vapors in highly compressed gases without affecting the original particle spectra and concentrations. The vapors are separated from particles primarily through diffusion mechanism and collected on cold surfaces. Four important parameters are the length, the flow rate, the temperature, and the diffusion coefficients of the vapors to be removed. Important applications include sampling particles from high pressure gases and condensible vapor-free filling for ultra-pure cylinder gases.

Method of separating condensible vapors from particles in highly

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Allen, TX, United States of America

Stephen Chesters