International Business Machines Corporation

Stephen Arthur St Onge

James Stuart Dunn

Douglas Duane Coolbaugh

Louis DeWolf Lanzerotti

David Louis Harame

Robb Allen Johnson

Steven H Voldman

Nicholas Theodore Schmidt

Anthony K Stamper

Alvin Jose Joseph

Kerry Bernstein

Robert Mark Rassel

Andreas Daniel Stricker

David Charles Sheridan

Peter B Gray

Peter John Geiss

Bradley Alan Orner

Michael D Hulvey

Edward J Nowak

Qizhi Liu

Zhong-Xiang He

Jeffrey Bowman Johnson

Marwan H Khater

Francois Pagette

Ryan Wayne Wuthrich

Marc Waine Cantell

Brian L Tessier

Douglas Brian Hershberger

Kent E Morrett

Kenneth Knetch Kieft, Iii

Jay S Rascoe

Ping-Chuan Wang

Xuefeng Liu

James Albert Slinkman

Robert Allen Groves

Kathryn Turner Schonenberg

Michael Joseph Zierak

Gregory Gower Freeman

Vidhya Ramachandran

Natalie Barbara Feilchenfeld

Richard A Phelps

Robert Michael Geffken

Richard John Rassel

Seshadri Subbanna

Josef S Watts

David S Collins

Eric Adler

Jae-Sung Rieh

John J Benoit

Jiansheng Xu

Michael Lawrence Gautsch

Wan Ni

Systems and methods are provided for capturing mutual coupling effects between an integrated circuit chip and chip package using electronic design automation (EDA) tools. Specifically, a method is provided that is implemented in a computer infrastructure for designing an integrated circuit chip. The method includes compiling process technology parameters that describe electrical behavior for a chip-package coupling and a package of the integrated circuit chip. The method also includes generating a parasitic technology file to include the compiled process technology parameters.

Capturing mutual coupling effects between an integrated circuit chip and chip package

An asymmetric silicon-on-insulator (SOI) junction field effect transistor (JFET) and a method. The JFET includes a bottom gate on an insulator layer, a channel region on the bottom gate and, on the channel region, source/drain regions and a top gate between the source/drain regions. STIs isolate the source/drain regions from the top gate and a DTI laterally surrounds the JFET to isolate it from other devices. Non-annular well(s) are positioned adjacent to the channel region and bottom gate (e.g., a well having the same conductivity type as the top and bottom gates can be connected to the top gate and can extend down to the insulator layer, forming a gate contact on only a portion of the channel region, and/or another well having the same conductivity type as the channel and source/drain regions can extend from the source region to the insulator layer, forming a source-to-channel strap).

Asymmetric silicon-on-insulator (SOI) junction field effect transistor (JFET) and a method of forming the asymmetrical SOI JFET

Methods are disclosed for forming a varied impurity profile for a collector using scattered ions while simultaneously forming a subcollector. In one embodiment, the invention includes: providing a substrate; forming a mask layer on the substrate including a first opening having a first dimension; and substantially simultaneously forming through the first opening a first impurity region at a first depth in the substrate (subcollector) and a second impurity region at a second depth different than the first depth in the substrate. The breakdown voltage of a device can be controlled by the size of the first dimension, i.e., the distance of first opening to an active region of the device. Numerous different sized openings can be used to provide devices with different breakdown voltages using a single mask and single implant. A semiconductor device is also disclosed.

Varied impurity profile region formation for varying breakdown voltage of devices

A structure for a semiconductor device includes an isolated MOSFET (e.g., NFET) having triple-well technology adjacent to an isolated PFET which itself is adjacent to an isolated NFET. The structure includes a substrate in which is formed a deep n-band region underneath any n-wells, p-wells and p-band regions within the substrate. One p-band region is formed above the deep n-band region and underneath the isolated p-well for the isolated MOSFET, while another p-band region is formed above the deep n-band region and underneath all of the p-wells and n-wells, including those that are part of the isolated PFET and NFET devices within the substrate. The n-wells for the isolated MOSFET are connected to the deep n-band region. The resulting structure provides for improved device isolation and reduction of noise propagating from the substrate to the FETs while maintaining the standard CMOS spacing layout spacing rules and electrical biasing characteristics both external and internal to the triple-well isolation regions.

Optimized device isolation

Disclosed is a method of forming a semiconductor structure that includes a discontinuous non-planar sub-collector having a different polarity than the underlying substrate. In addition, this structure includes an active area (collector) above the sub-collector, a base above the active area, and an emitter above the base. The distance between the discontinuous portions of the discontinuous sub-collector tunes the performance characteristics of the semiconductor structure. The performance characteristics that are tunable include breakdown voltage, unity current gain cutoff frequency, unity power gain cutoff frequency, transit frequency, current density, capacitance range, noise injection, minority carrier injection and trigger and holding voltage.

Tuneable semiconductor device with discontinuous portions in the sub-collector

Disclosed is a method and structure for an integrated circuit structure that includes a plurality of complementary metal oxide semiconductor (CMOS) transistors and a plurality of vertical bipolar transistors positioned on a single substrate. The vertical bipolar transistors are taller devices than the CMOS transistors. In this structure, a passivating layer is positioned above the substrate, and between the vertical bipolar transistors and the CMOS transistors. A wiring layer is above the passivating layer. The vertical bipolar transistors are in direct contact with the wiring layer and the CMOS transistors are connected to the wiring layer by contacts extending through the passivating layer.

Bipolar and CMOS integration with reduced contact height

Methods of manufacturing a semiconductor structure are disclosed including a deep trench isolation in which a channel stop is formed in the form of an embedded impurity region in the substrate prior to the deep trench etch and formation of transistor devices (FEOL processing) on the substrate. In this fashion, the FEOL processing thermal cycles can activate the impurity region. The deep trench isolations are then formed after FEOL processing. The method achieves the reduced cost of forming deep trench isolations after FEOL processing, and allows the practice of sharing of a collector level between devices to continue.

Methods for forming channel stop for deep trench isolation prior to deep trench etch

A semiconductor-insulator-silicide (SIS) capacitor is formed by depositing a thin silicon containing layer on a salicide mask dielectric layer, followed by lithographic patterning of the stack and metallization of the thin silicon containing layer and other exposed semiconductor portions of a semiconductor substrate. The thin silicon containing layer is fully reacted during metallization and consequently converted to a silicide alloy layer, which is a first electrode of a capacitor. The salicide mask dielectric layer is the capacitor dielectric. The second electrode of the capacitor may be a doped polycrystalline silicon containing layer, a doped single crystalline semiconductor region, or another doped polycrystalline silicon containing layer disposed on the doped polycrystalline silicon containing layer. The SIS insulator may further comprise other dielectric layers and conductive layers to increase capacitance per area.

Semiconductor-insulator-silicide capacitor

A device. The device includes two bipolar transistors electrically connected to each other. Each bipolar transistor of the two bipolar transistors may include a base contact and an emitter contact surrounding the base contact, wherein the emitters contacts of the two bipolar transistor are in electrical contact with each other. A first bipolar transistor of the two bipolar transistors may have a first wiring stack and a second bipolar transistor two bipolar transistors may have a second wiring stack, wherein the second wiring stack includes at least one more wiring level than the first wiring stack.

Redundant interconnect high current bipolar device and method of forming the device

A bipolar transistor with raised extrinsic base and selectable self-alignment between the extrinsic base and the emitter is disclosed. The fabrication method may include the formation of a predefined thickness of a first extrinsic base layer of polysilicon or silicon on an intrinsic base. A dielectric landing pad is then formed by lithography on the first extrinsic base layer. Next, a second extrinsic base layer of polysilicon or silicon is formed on top of the dielectric landing pad to finalize the raised extrinsic base total thickness. An emitter opening is formed using lithography and RIE, where the second extrinsic base layer is etched stopping on the dielectric landing pad. The degree of self-alignment between the emitter and the raised extrinsic base is achieved by selecting the first extrinsic base layer thickness, the dielectric landing pad width, and the spacer width.

Bipolar transistor having raised extrinsic base with selectable self-alignment and methods of forming same

A bipolar transistor having a base contact surrounded by an emitter contact. A plurality of wires extending from the base contact and the emitter contact of the bipolar transistor, wherein the wires of the base contact are stacked higher than the wires of the emitter contact. A device comprising a plurality of these bipolar transistors, wherein at least one side of each emitter contact abuts each adjacent transistor. Increasing the wiring stack of each row of transistors in the device as the distance between the row and the current input increases.

The present invention provides a unique device structure and method that provides increased transistor performance in integrated bipolar circuit devices. The preferred embodiment of the present invention provides improved high speed performance by providing reduced base resistence. The preferred design forms the extrinsic base by diffusing dopants from a dopant source layer and into the extrinsic base region. This diffusion of dopants forms at least a portion of the extrinsic base. In particular, the portion adjacent to the intrinsic base region is formed by diffusion. This solution avoids the problems caused by traditional solutions that implanted the extrinsic base. Specifically, by forming at least a portion of the extrinsic base by diffusion, the problem of damage to base region is minimized. This reduced damage enhances dopant diffusion into the intrinsic base. Additionally, the formed extrinsic base can have improved resistence, resulting in an improved maximum frequency for the bipolar device. Additionally, the extrinsic base can be formed with a self-aligned manufacturing process that reduces fabrication complexity.

Diffused extrinsic base and method for fabrication

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Colchester, VT, United States of America

Stephen Arthur St Onge