Other

Hewlett-packard Company

Stephen A DiCarolis

Ronald Hiskes

Rene P Helbing

A method for depositing a thin film including a sulfide of a metal on a substrate. First and second vapor streams are generated and combined in the vicinity of the substrate. The first vapor stream includes an organic compound containing the metal is generated. The second vapor stream includes a mercaptan. The preferred mercaptan is tertrary-butyl-mercaptan. The preferred metal precursor is a .beta.-diketonate of the metal.

Growth of electroluminescent phosphors by MOCVD

A system for MOCVD fabrication of superconducting oxide thin films provides a feed tube having a narrow slot along its length with a uniform mixture of powdered precursor materials packed inside the tube. The mixture composition is such that the resulting film has the desired stoichiometry. The tube moves downward at a controlled rate past a bank of heating lamps surrounded by a heat reflector. At each position of the tube this structure heats a localized section of the precursor material, with a sharp temperature gradient at the boundary of the section so that the heating is confined to this section. The precursor material in the heated section is substantially completely vaporized, with negligible decomposition and nonvolatile residue formation, and the vaporization rate is governed by the downward velocity of the tube. The vaporized material escapes through the longitudinal slot, and is swept by a carrier gas into a reaction zone. Oxygen is mixed with the gas stream, and the reaction products are deposited as a thin film on the substrate. A modification of this system includes coils adjacent to the reaction zone, connected to an rf generator. These coils produce a plasma in the reagent gas mixture that enhances the chemical reaction.

MOCVD system for forming superconducting thin films

A precursor used in an MOCVD reactor for production of thin films of certain metal oxides is stabilized by introducing a ligand into the precursor during the precursor synthesis and thereby protecting the precursor from premature oxidation, nucleation, and decomposition.

Stabilization of precursors for thin film deposition

A process is disclosed for producing a homogeneous mixture of co-precipitated carbonate salts capable of reacting together in an oxygen atmosphere at an elevated temperature to form a superconducting ceramic which comprises forming a first solution by dissolving in a first solvent maintained at a temperature of from about 15.degree. to 35.degree. C. a rare earth compound, an alkaline earth metal compound, and a copper compound capable of reacting with a carbonate ion to form an insoluble precipitate of carbonate salts in the solvent used to form the solution; forming a second solution containing a carbonate-forming compound dissolved in a second solvent miscible with the first solvent; blending the first and second solutions together at a temperature of from about 0.degree. to 15.degree. C. to inhibit formation of a precipitate; and heating the blended solutions to a temperature sufficient to cause the carbonate-forming compound dissolved in the second solution to decompose to form carbonate anions to thereby form a carbonate precipitate comprising a homogeneous mixture of the carbonate salts of the rare earth, alkaline earth metal, and copper compounds dissolved in the first solution.

Growing community of inventors

Santa Clara, CA, United States of America

Stephen A DiCarolis