Speedfam Corporation

Stephen A Boettcher

David M McNamara

The regulator assembly comprises body member carried by a support and defining a cavity for detaining a pool of abrasive slurry. An overflow device is associated with the body member for establishing the upper level of a pool of abrasive slurry in the cavity. At least one flow-restrictive conduit component is secured at one end to the body member, communicates with the cavity at the lower end of the pool of abrasive slurry, and presents an outer end from which abrasive slurry is discharged. One of the above-indicated elements is movable whereby to selectively adjust the vertical distance between the plane of the upper level of the pool of abrasive slurry and the plane of the outer end of the conduit component.

Abrasive slurry regulator assembly

The regulator assembly comprises body means carried by a support and defining a cavity for detaining a pool of abrasive slurry. Overflow means is associated with the body means for establishing the upper level of a pool of abrasive slurry in the cavity. At least one flow-restrictive conduit means is secured at one end to the body means, communicates with the cavity at the lower end of the pool of abrasive slurry, and presents an outer end from which abrasive slurry is discharged. One of the above-indicated means is movable whereby to selectively adjust the vertical distance between the plane of the upper level of the pool of abrasive slurry and the plane of the outer end of the conduit means.

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Deerfield, IL, United States of America

Stephen A Boettcher