Fei Comapny

Stephanus Hubertus Leonardus Van Den Boom

Pleun Dona

Hendrik Nicolaas Slingerland

Uwe Luecken

Gerbert Jeroen Van De Water

Hervé-William Rémigy

Laurens Franz Taemsz Kwakman

Gijs Van Duinen

Martin Verheijen

Rients Jan De Groot

Fotios Sakellariou

Roland Wilhelmus Pieter Jonkers

Henricus Fransiscus Maria Van Den Boom

Pieter Hendrik Trudo Johannes Uland

A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus

The invention relates to an improved O-ring seal for use as a high vacuum seal. A limitation of standard O-ring seals is the permeation of water through the O-ring. Especially for instruments in which parts are kept at a cryogenic temperature, such as a cryogenic electron microscope, the presence of water in the vacuum is a problem, as this results in ice growth on the cryogenic parts. As a solution often a double O-ring seal is used, or a metal seal. Both of these solutions have severe draw-backs. The invention proposes to place the O-ring in a channel in which dry gas, such as dry nitrogen, is blown. In this way no water can permeate through the O-ring, resulting in a reduced base pressure and highly reduced ice growth.

High-vacuum seal

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Geldrop, Netherlands

Stephanus Hubertus Leonardus Van Den Boom