Globalfoundries Inc.

Walmart Apollo, LLC

Alert Innovation Inc.

Globalfoundries U.S. Inc.

Stephanie Waite

William John Fosnight

John G Lert, Jr

Julian D Warhurst

Abner Bello

Christopher A Hofmeister

Stephen Bradley Miner

John Robinson

Thomas Beeg

Ryan John Gallagher

Leslie Marshall

Eric Christensen

Gabriel Gaxiola

Mark Solomon

Devin Lert

David Hartnett

An automated order fulfillment system is disclosed having different temperature zones and robots and containers capable of and/or configured to work in these different temperature zones.

Tote handling for chilled or frozen goods

An automated order fulfillment system is disclosed having different temperature zones and robots and containers capable of and/or configured to work in these different temperature zones. Containers include insulated wall panels and a thermal insert which may be chilled to maintain a temperature within the container below ambient temperature. Structure within a storage location for the containers may be used to open and close the containers to facilitate cooling of the thermal insert.

An automatic storage and retrieval system is disclosed including storage positions for storing containers, a portal and mobile robots for transferring the containers between the storage positions and portal. The portal may include a bot-access side where the mobile robots transfer containers to and from the portal, and a user-access side where users remove items from the containers.

System having workstation with tote retention and release mechanism

Rechargeable wafer carrier systems and methods are provided. A rechargeable wafer carrier system includes, for instance, a housing for holding at least one wafer and at least one electronics system therein, a rechargeable power source operably connected to the housing for powering the at least one electronics system, and a charging interface for receiving a supply of power for charging the rechargeable power source. The housing may be configured for transport within an automated material handling system. Also provided are methods of charging a rechargeable wafer carrier system, which includes, for instance, providing a rechargeable wafer carrier system having at least one electronics system and a rechargeable power source, operably connecting the rechargeable wafer carrier system to a charging base, and supplying power from the charging base to the rechargeable power source.

Rechargeable wafer carrier systems

Self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers. The wafer carrier system may include a housing configured for transport within the automated material handling system. A support is configured to support a semiconductor wafer within a housing. A metrology system is disposed within the housing. The metrology system is operable to measure at least one characteristic of the wafer. The metrology system may include a sensing unit and a computing unit operably connected to the sensing unit.

Self-contained metrology wafer carrier systems

A wafer carrier purge apparatus, an automated mechanical handling system, and a method of handling a wafer carrier during integrated circuit fabrication are provided. The wafer carrier purge apparatus includes a purge plate adapted for insertion into a carrier storage position. The purge plate includes a gas port and a gas nozzle in fluid communication with the gas port. The gas port receives a gas flow. The gas nozzle is adapted to contact an inlet port of a wafer carrier. The purge plate further includes a vacuum port and a vacuum nozzle in fluid communication with the vacuum port, spaced from the gas nozzle. The vacuum nozzle is adapted to capture gas that escapes from the wafer carrier through an outlet port of the wafer carrier. The purge plate is separate and removable from the carrier storage position.

Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication

A self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers are provided. A wafer carrier system includes, for instance, a housing configured for transport within the automated material handling system, the housing having a support configured to support a semiconductor wafer in the housing, and a metrology system disposed within the housing, the metrology system operable to measure at least one characteristic of the wafer, the metrology system comprising a sensing unit and a computing unit operably connected to the sensing unit. Also provided are methods of measuring one or more characteristics of a semiconductor wafer within the wafer carrier systems of the present disclosure.

A method for operating a material handling system including an overhead rack defining a plurality of storage positions, first and second side rails disposed above the overhead rack, a first cross rail movably coupled to the first and second side rails, and a first transport vehicle movably coupled to the first cross rail includes positioning the first transport vehicle above at least one interior window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the interior window to interface with a first load port of a first tool disposed below the overhead rack. The first transport vehicle is positioned above at least one periphery window defined in the overhead rack. At least a portion of the first transport vehicle is descended through the periphery window to interface with a second load port of a second tool disposed below the overhead rack.

Overhead substrate handling and storage system

Methodology and system for using vacuum pods to store/transport semiconductor wafers to efficiently reduce contamination of the wafers while reducing cost, cycle time, and process steps and tools without the need for a complete reconfiguration of processes/tools in the fabrication facility are disclosed. Embodiments include configuring a wafer pod with an isolated vacuum environment for storing and transporting semiconductor wafers; configuring a load port module with an isolated vacuum environment to interface with the wafer pod; transporting the wafer pod, including semiconductor wafers, to interlock with the load port module; creating a merged vacuum environment including the isolated vacuum environments of the wafer pod and the load port module; increasing a pressure level in the merged vacuum environment for creating a merged ambient atmospheric environment; and transferring the semiconductor wafers through a transfer chamber, with an isolated environment, from the load port module to a semiconductor wafer processing device.

Method and apparatus for storing and transporting semiconductor wafers in a vacuum pod

A material handling system includes an overhead rack defining a plurality of storage positions. The overhead rack defines at least one interior window devoid of storage locations. First and second side rails are disposed above the overhead rack. A first cross rail is movably coupled to the first and second side rails. A first transport vehicle movably is coupled to the first cross rail and operable to descend below the overhead rack through the at least one interior window.

Growing community of inventors

Glens Falls, NY, United States of America

Stephanie Waite