Silios Technologies

Ion Beam Services

Stephane Tisserand

Laurent Roux

Vincent Sauget

Marc Hubert

Ludovic Escoubas

Fabien Reversat

Aurélien Faiola

Emmanuel Drouard

Frank Torregrossa

Francois Flory

A hybrid multispectral imaging sensor, characterized in that it comprises a photosensitive backside-illumination detector (DET) that is made on a substrate () made of InP, and that is formed of a matrix of pixels (, P, P, P) that are themselves made in a structure based on InGaAs (), and a filter module (MF) that is formed of a matrix of elementary filters (λ) reproducing said matrix of pixels, and that is mounted into contact with said substrate (), said substrate () made of InP having a thickness less than 50 μm, and preferably less than 30 μm.

Multispectral imaging sensor provided with means for limiting crosstalk

The invention relates to a multispectral imaging device including: a photosensitive detector DET made up of a matrix of pixels; an array of microlenses ML, ML, MLreproducing the matrix of pixels; and a filter module MF formed by a matrix of individual filters &#x3bb;reproducing the matrix of pixels. The device is remarkable in that the array of microlenses is arranged directly in contact with the detector DET, and the filter module MF is made on a substrate SS that is put into contact with the array of microlenses.

Multispectral imaging device with array of microlenses

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Aubagne, France

Stephane Tisserand