Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Webster Capital LLC

Stephane Moreau

Sébastien Bolis

Thierry Hilt

Herve Boutry

Remy Franiatte

An optical device with a deformable membrane () including an anchor area () on a support () entrapping a liquid or gas fluid, a central area () reversibly deformable from a rest position, actuating means for moving the fluid () biasing the membrane () into an intermediate area between the anchor area () and the central area (), the actuating means include a piezoelectric continuous crown accommodating several actuators (), this crown surrounding the central area (), the actuating means () being anchored to the membrane () in at least the intermediate area (), the actuating means () and the membrane () to which they are anchored, forming at least one piezoelectric bimorph (B), the actuating means () radially contracting or extending upon actuation so as to generate a movement of said fluid () from the intermediate area () to the central area () of the membrane () or vice versa, aiming at deforming the central area () with respect to its rest position.

Optical device with a piezoelectrically actuated deformable membrane shaped as a continuous crown

An optical device with a deformable membrane including an anchor area on a support entrapping a liquid or gas fluid, a central area reversibly deformable from a rest position, actuating means for moving the fluid biasing the membrane into an intermediate area between the anchor area and the central area, the actuating means include a piezoelectric continuous crown accommodating several actuators, this crown surrounding the central area, the actuating means being anchored to the membrane in the intermediate area, the actuating means and the membrane to which they are anchored, forming at least one piezoelectric bimorph, the actuating means radially contracting or extending upon actuation to generate a movement of said fluid from the intermediate area to the central area of the membrane or vice versa, aiming at deforming the central area with respect to its rest position.

The invention pertains to a method for manufacturing a microelectronic device on a substrate comprising at least one first electrical component and one second electrical component distributed respectively in first and second levels stacked one on top of the other on the substrate, this method comprising:

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Le Chevalon de Voreppe, France

Stephane Moreau