Centre National De La Recherche Scientifique

Electricite De France

Stephane Collin

Jean-Luc Pelouard

Daniel Lincot

Riad Haidar

Fabrice Pardo

Jean-François Guillemoles

Laurent Lombez

Myriam Paire

Gregory Vincent

A method for fabricating a photosensitive device, comprising: a first step of preparing, on a substrate, at least a first photosensitive portion, active within a range of wavelengths, the first portion being surrounded by a second portion that is inactive. A material, covering the first portion, is selectively arranged into a hydrophilic layer by an electrochemical process. The second portion comprises a hydrophobic material on an upper surface opposite the substrate. The method further comprises the following steps: spraying on the upper surfaces of the first and second portions a liquid comprising a transparent material, and forming a converging lens containing the material, above the first portion.

Method for fabricating a photosensitive device

This invention relates to an MSM type photo-detection device designed to detect incident light and comprising reflecting means () superposed on a support (), to form a first mirror for a Fabry-P&#xe9;rot type resonant cavity, a layer of material () that does not absorb light, an active layer () made of a semiconducting material absorbing incident light and a network () of polarization electrodes collecting the detected signal. The electrodes network is arranged on the active layer and is composed of parallel conducting strips at a uniform spacing at a period less than the wavelength of incident light, the electrodes network forming a second mirror for the resonant cavity, the optical characteristics of this second mirror being determined by the geometric dimensions of the said conducting strips. The distance separating the first mirror from the second mirror is determined to obtain a Fabry-P&#xe9;rot type resonance for incident light between these two mirrors.

MSM type photodetection device with resonant cavity comprising a mirror with a network of metallic electrodes

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Paris, France

Stephane Collin